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首页> 外文会议>Microfluidics, BioMEMS, and Medical Microsystems V; Proceedings of SPIE-The International Society for Optical Engineering; vol.6465 >Integration of red VCSEL in a versatile microchip for encoding and subsequent detection of encoded beads
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Integration of red VCSEL in a versatile microchip for encoding and subsequent detection of encoded beads

机译：将红色VCSEL集成到通用微芯片中，以进行编码和随后的编码珠检测

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摘要

The integration of discrete optical excitation and detection components in a microfluidic platform is an important pre-requisite for realisation of Lab-on-a-chip devices. This research presents a microfluidic system made of polymer material with integrated miniaturized vertical cavity surface emitting laser (VCSEL) source. The light emitted by the VCSEL is detected by a conventional 5 mm diameter photodiode. The ability to read and detect microbeads encoded with through holes in the silicon substrate verified successful integration of a functional VCSEL in the polymer microchip. The microfluidic system was composed of two processed polymer chips that are bonded together. The substrate contains cavities to accommodate VCSEL components. The second polymer chip (superstrate) contains the microfluidic channel network. The conventional photodiode detector was easily mounted on top of the superstrate. Polymer chip substrates and master templates for hot embossing were fabricated by rapid prototyping technology. Fabricated masters were then moulded into thermoplastic polycarbonate (PC) substrate by hot embossing. Generated polymer sheets with embossed structures were diced into polymer chips and subsequently bonded together using a customised procedure to provide a complementary moulded cavity which accommodates the VCSEL. The optically encoded microbeads are illuminated with a VCSEL which is operated with a power of 0.7 Mw. As the bead flows along the channel (illuminated with the VCSEL), the emitted light from the VCSEL device is modulated by the bar code and subsequently detected by the photodiode. Signal measurements confirm that different levels of the VCSEL light can be reproducibly detected by customized Labview software.
机译：在微流体平台上集成分立的光学激发和检测组件是实现芯片实验室设备的重要先决条件。这项研究提出了一种由聚合物材料制成的微流体系统，并集成了小型化的垂直腔表面发射激光器（VCSEL）源。 VCSEL发出的光由常规5 mm直径的光电二极管检测。读取和检测硅基板中通孔编码的微珠的能力证明了功能性VCSEL在聚合物微芯片中的成功集成。微流体系统由两个粘合在一起的经过处理的聚合物芯片组成。基板包含容纳VCSEL组件的空腔。第二聚合物芯片（上层）包含微流体通道网络。常规的光电二极管检测器很容易安装在盖板上方。通过快速原型技术制造用于热压花的聚合物芯片基板和主模板。然后通过热压印将制成的母盘模制成热塑性聚碳酸酯（PC）基板。将生成的具有压纹结构的聚合物片切成小块，然后使用定制的程序将它们粘合在一起，以提供一个可容纳VCSEL的互补模腔。用VCSEL照射光学编码的微珠，VCSEL的功率为0.7 Mw。当磁珠沿着通道流动时（用VCSEL照射），VCSEL器件发出的光被条形码调制，随后被光电二极管检测到。信号测量结果表明，可以通过定制的Labview软件可重复检测出不同水平的VCSEL光。

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