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首页> 外文会议>Microfluidics, BioMEMS, and Medical Microsystems V; Proceedings of SPIE-The International Society for Optical Engineering; vol.6465 >A Microfluidic MEMS Sensor for the Measurement of Density and Viscosity at High Pressure
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A Microfluidic MEMS Sensor for the Measurement of Density and Viscosity at High Pressure

机译：用于在高压下测量密度和粘度的微流体MEMS传感器

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摘要

We present a sensor fabricated with MEMS (Micro-Electro-Mechanical Systems) technology that quickly measures fluid density and viscosity. This sensor is fabricated inside of a microfluidic channel through which the fluid to be measured passes. The operational principal involves the influence of the fluid on the resonance frequency and quality factor of a vibrating plate oscillating normal to its plane. By performing measurements in liquids we have demonstrated operability in fluids with densities between (0.6 to 1.5) g/cc and viscosities between (0.4 to 100) cP. Such measurements are required to determine the economic feasibility of recovering hydrocarbon from subterranean strata. There are numerous examples in the literature of sensors fabricated by the methods of MEMS that are claimed to measure both density and viscosity of fluids, but in most cases, the accuracy of such sensors is not been demonstrated in a wide range of fluids and moreover, their use in non-laboratory environments has not been proven.~1, 2, 3, Here we show that it is possible to design and package a sensor that can function with high accuracy in extreme environments while providing useful information.
机译：我们介绍了一种采用MEMS（微机电系统）技术制造的传感器，该传感器可快速测量流体密度和粘度。该传感器被制造在微流体通道内部，待测流体通过该微流体通道。操作原理涉及流体对垂直于其平面振动的振动板的共振频率和品质因数的影响。通过在液体中进行测量，我们证明了在密度（0.6至1.5）g / cc和粘度（0.4至100）cP之间的流体中的可操作性。需要进行这些测量以确定从地下地层中采收烃的经济可行性。文献中有许多通过MEMS方法制造的传感器示例，它们声称可以同时测量流体的密度和粘度，但是在大多数情况下，这种传感器的精度并未在各种流体中得到证实，而且，它们在非实验室环境中的使用尚未得到证明。〜1、2、3，此处我们表明，可以设计和包装一种传感器，该传感器在极端环境中可以高精度运行，同时提供有用的信息。

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