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首页> 外文会议>Micromachining Technology for Micro-Optics and Nano-Optics IV >Tolerancing microlenses using ZEMAX~reg;
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Tolerancing microlenses using ZEMAX~reg;

机译：使用ZEMAX〜®的微透镜公差

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摘要

This paper demonstrates a new tolerancing technique that allows the prediction of microlens optical performance based on metrology measurements taken during the fabrication process. A method for tolerancing microlenses to ensure operating performance using the optical design code ZEMAX~® is presented. Parameters able to be measured by available metrology tools are assigned tolerances. The goal of the tolerance analysis is to assess the sensitivity of a microlens design to changes in the shape of the lens surface with regard to specific optical performance criteria related to the intended application. Two designs are presented with the tolerance analysis results. In the first design, the radius of curvature and conic constant are varied for an aspheric lens, and the change in the spot size is determined. For the second design, fiber-coupling efficiency is tabulated for a biconic lens. In each case, a metric can be produced showing the ability of the design to meet performance goals within the specified tolerances. A fabrication technician can then use this tolerancing metric with appropriate metrology data to determine if the device will yield acceptable performance. The metric can also determine if a design is overly sensitive to expected tolerances, thereby allowing the optical designer to evaluate the design from a manufacturing perspective.
机译：本文演示了一种新的公差技术，该技术允许根据制造过程中进行的计量测量来预测微透镜的光学性能。提出了一种使用光学设计代码ZEMAX®来容忍微透镜以确保操作性能的方法。可以通过可用的度量工具测量的参数被分配了公差。公差分析的目的是针对与预期应用相关的特定光学性能标准，评估微透镜设计对透镜表面形状变化的敏感性。给出了两种设计以及公差分析结果。在第一种设计中，对于非球面透镜，曲率半径和圆锥常数是变化的，并且确定光斑大小的变化。对于第二种设计，表列了双锥透镜的光纤耦合效率。在每种情况下，都可以生成一个度量，以显示设计在指定公差内达到性能目标的能力。然后，制造技术人员可以将此公差度量与适当的度量数据一起使用，以确定设备是否会产生可接受的性能。度量还可以确定设计是否对预期公差过于敏感，从而使光学设计人员可以从制造角度评估设计。

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