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On Binary Topology Design of Electro-Thermally-Compliant MEMS

机译：电热兼容MEMS的二进制拓扑设计

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摘要

We demonstrate a method for topology design of Electro- Thermally-Compliant Micro- Electro- Mechanical Systems (MEMS). The method ensures well connected perfectly binary solutions for which only nominal post processing is needed. The Adaptive Material Mask Overlay (AMOM) topology design algorithm is stochastic and is based on the very principle used to fabricate micro- devices and IC circuits. The method employs negative circular masks that act as local material sinks. The center coordinates, radii and the number of masks are all systematically determined to obtain the final topologies for a given computational effort. Three examples, presented elsewhere, are re- solved using the proposed scheme and the solutions are compared with those obtained using the classical gradient based methods. The proposed method shows promise in yielding multiple and large deformation solutions.
机译：我们演示了一种用于电热兼容微机电系统（MEMS）的拓扑设计方法。该方法确保了仅需要名义后处理的连接良好的完美二进制解决方案。自适应材料掩膜覆盖（AMOM）拓扑设计算法是随机的，并且基于用于制造微器件和IC电路的原理。该方法采用负圆形掩模作为局部材料槽。中心坐标，半径和蒙版数都可以系统地确定，以获得给定计算量的最终拓扑。使用建议的方案解决了其他地方提出的三个示例，并将这些解决方案与使用基于经典梯度的方法获得的解决方案进行了比较。所提出的方法在产生多个大变形解中显示出希望。

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