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Vibration measurement of microstructures by means of laser-optical modal analysis

机译：激光模态分析法测量微结构的振动

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Abstract: Investigation of the vibrational behavior under operating conditions are often necessary for realization and inspection of sensor and actuator functions even to assure of there high reliability. Also the behavior under separate excitations is important to know especially for applications of sensors and actuators into vibrating environments. Relating to this exceptionally high demands are exemplary required for aviation, automotive industries, and mechanical engineering. The paper describes the coupling of a Single-Point Laser Vibrometer with a Modal Analysis System. Beside detection of eigenfrequencies a contactless determination of mode shapes is possible too. For vibrational characterization of scanning micromirrors were to investigate both the vibrational behavior under operating conditions and under separate excitation. Gradual improvements to develop an appropriate test stand for vibration measurements at these microstructures are represented. Also measurements taken with Laserscanning Vibrometry and Holographic Interferometry are discussed. Results of Laseroptical Modal Analysis could serve as foundation for calculations and numerical simulations. !3
机译：摘要：为了确保传感器和执行器的可靠性，通常需要对操作条件下的振动行为进行研究，以实现和检查传感器和执行器的功能。另外，尤其对于传感器和执行器在振动环境中的应用，要知道单独激励下的行为也很重要。与此相关的异常高的需求是航空，汽车工业和机械工程的典范要求。本文介绍了单点激光振动计与模态分析系统的耦合。除了检测本征频率外，也可以非接触确定模态形状。对于扫描微镜的振动特性，要研究在工作条件下和在单独激励下的振动行为。代表了逐步改进以开发用于在这些微结构上进行振动测量的合适测试台。还讨论了用激光扫描振动法和全息干涉法进行的测量。激光模态分析的结果可作为计算和数值模拟的基础。 ！3

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