Abstract: There is a growing need for micro-optical components in the field of tele- and datacom applications. Such components have to be very precise and should be available in reasonable numbers. Microtechnology provides manufacturing techniques that fulfill both requirements. Using micro electro discharge machining, laser micromachining, ultra precision milling and deep lithography with subsequent electroforming methods, complex tools for the replication of highly precise plastic parts have been manufactured. In many cases a combination of methods enumerated above gives a tool which shows both functionality and cost-efficiency. As examples we present the realization of integrated-optical components with passive fiber-waveguide coupling used as components in optical networks and as velocity sensors for two-phase flows, like liquids containing small gas bubbles or particles. In the first case multimode 4 $MUL 4 star couplers have been manufactured in a pilot series that show excess loss values below 3 dB and a uniformity better than 3 dB at 830 nm. This performance becomes possible by using a compression molding process. By stamping the microstructured mold into a semifinished PMMA plate exact replication of the molds as well as very low surface roughness of the waveguide side walls could be observed. In the second case the waveguide channels of the flow sensors show dimensions of between 20 micrometer and 100 micrometer and an aspect ratio of about 20. These structures have been replicated by injection molding of PMMA using variotherm process treatment with a cycle time of about 2 - 3 min. !7
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机译：摘要：在电信和数据通信应用领域中，对微光学组件的需求不断增长。这些组件必须非常精确，并且应该以合理数量提供。微技术提供了可以同时满足这两个要求的制造技术。使用微放电加工，激光微加工，超精密铣削和深光刻技术以及随后的电铸方法，已经制造出用于复制高精度塑料零件的复杂工具。在许多情况下，上面列举的方法的组合提供了一种既显示功能又具有成本效益的工具。作为示例，我们介绍了使用无源光纤-波导耦合的集成光学组件的实现，这些组件用作光网络中的组件以及用作两相流的速度传感器，例如包含小气泡或微粒的液体。在第一种情况下，以先导系列制造了多模4 $ MUL 4星型耦合器，该耦合器在830 nm处显示出低于3 dB的过量损耗值和优于3 dB的均匀性。通过使用压缩成型工艺，该性能变得可能。通过将微结构化的模具冲压到半成品PMMA板上，可以观察到模具的精确复制以及波导侧壁的表面粗糙度非常低。在第二种情况下，流量传感器的波导通道的尺寸在20微米至100微米之间，纵横比大约为20。这些结构已通过使用约2-循环时间的恒温处理通过PMMA的注模法复制。 3分钟！7
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