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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >Development of Fatigue Pre-Cracking Method into Micro-Sized Specimens for Measuring Fracture Toughness
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Development of Fatigue Pre-Cracking Method into Micro-Sized Specimens for Measuring Fracture Toughness

机译：疲劳预破裂方法在用于测量断裂韧性的微型试样中的发展

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In our previous investigations, we have demonstrated that the introduction of fatigue pre-crack ahead of a notch is required to measure reliable fracture toughness values even for micro-sized specimens. However, it is rather difficult to introduce a fatigue pre-crack into a micro-sized specimen as once a fatigue crack starts to grow then the fatigue fracture occurs within one thousand cycles and this makes it extremely difficult to control fatigue crack length. Therefore, a new fatigue pre-cracking method is required for measuring fracture toughness. In this investigation, a new fatigue pre-cracking method has been proposed for micro-sized specimens and fracture toughness tests were carried out for the micro-sized specimens with fatigue pre-crack. Micro-cantilever beam type specimens with dimensions of 10 x 10 x 50 μm~3 were prepared from an electroless deposited Ni-P amorphous alloy thin film and notches were introduced by focused ion beam machining. Fatigue pre-cracks were introduced ahead of the notches by far-field cyclic compression method using a mechanical testing machine for micro-sized specimens (MFT2000). Fracture tests were also carried out using the testing machine. Fatigue pre-cracks with length of 0.2 μm were confirmed on the fracture surfaces ahead of the notches in the far-field cyclically compressed specimens. This indicates that the fatigue pre-cracking method developed in this investigation is promising for measuring accurate fracture toughness for micro-sized specimens for MEMS applications.
机译：在我们以前的研究中，我们证明了即使在微型试样上也需要在缺口之前引入疲劳预裂纹，以测量可靠的断裂韧性值。然而，由于一旦疲劳裂纹开始增长然后在一千次循环内发生疲劳断裂，就很难将疲劳预裂纹引入到微尺寸的样品中，这使得控制疲劳裂纹长度非常困难。因此，需要新的疲劳预开裂方法来测量断裂韧性。在这项研究中，已经提出了一种用于微尺寸试样的新的疲劳预裂纹方法，并且对具有疲劳预裂纹的微尺寸试样进行了断裂韧性测试。用化学沉积的Ni-P非晶态合金薄膜制备尺寸为10 x 10 x 50μm〜3的微悬臂梁型试样，并通过聚焦离子束加工引入切口。疲劳预裂纹是通过使用微型试样的机械测试仪（MFT2000）的远场循环压缩方法在缺口处引入的。还使用测试机进行了断裂测试。在远场循环压缩试样中，在缺口前的断口表面确认了长度为0.2μm的疲劳预裂。这表明在这项研究中开发的疲劳预开裂方法有望用于测量用于MEMS应用的微型试样的精确断裂韧性。

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