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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >Mesoscale Thin Film Actuator for Promoting Fluid Motion in Microfluidic and Nanofluidic Channels
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Mesoscale Thin Film Actuator for Promoting Fluid Motion in Microfluidic and Nanofluidic Channels

机译：中尺度薄膜致动器，用于促进微流体和纳米流体通道中的流体运动

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Microfluidic and nanofluidic devices often require actuators to induce fluid motion for applications such as pumping and mixing in small channels. Mixing, for instance, is important in systems where channel or chamber dimensions are on the order of 100 μm or larger as diffusive mixing can be prohibitively slow at these dimensions. In this work, a new mesoscale thin film polymer electromechanical actuator is introduced for use in the aforementioned applications. Unlike inorganic piezoelectric actuators, the devices based on these materials will be relatively easy to fabricate involving no high temperature processing, crystal growth, or microlithography. Fabrication of an array of actuators is simply achieved by spin casting the polymer over top of lithographically patterned gold electrodes at a thickness of less than 50 nm. This simple process enables a microfluidic device based on these actuators to be an integral part of a microfluidic channel rather than a separate unit operation. Depending on the application, the actuator array can be designed and controlled for random perturbations of the fluid flow field as required for mixing or for systematic actuation as required for pumping. These thin-film mesoscale actuators have been characterized and show extremely favorable properties such as a high electrostrictive response (compared to none in the bulk) and a frequency response of up to 50 kHz. In addition, finite element simulations show feasibility of these actuators for use in microfluidic mixing applications.
机译：微流体和纳米流体设备通常需要致动器来引发流体运动，以用于诸如在小通道中泵送和混合的应用。例如，在通道或腔室尺寸约为100μm或更大的系统中，混合非常重要，因为在这些尺寸下，扩散混合可能会过慢。在这项工作中，引入了一种新的中尺度薄膜聚合物机电致动器，用于上述应用。与无机压电致动器不同，基于这些材料的设备将相对容易制造，且无需高温处理，晶体生长或微光刻。通过将聚合物以小于50 nm的厚度旋涂在光刻图案化的金电极顶部上，即可简单地实现执行器阵列的制造。这种简单的过程使基于这些致动器的微流体装置成为微流体通道的组成部分，而不是单独的单元操作。根据应用情况，可以设计和控制执行器阵列，以便根据混合需要对流体流场进行随机扰动，也可以根据泵送需要进行系统性操纵。这些薄膜中尺度致动器已经过表征，并显示出极佳的性能，例如高的电致伸缩响应（相比之下，大部分没有）和高达50 kHz的频率响应。此外，有限元模拟显示了这些执行器在微流体混合应用中的可行性。

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