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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >The Development of Alternative Molds for Micromolding
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The Development of Alternative Molds for Micromolding

机译：用于微成型的替代模具的开发

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Micromolding is a recently developed technique for fabricating parts in the millimeter size range with minimum features and dimensional tolerances less than 10 μm. This degree of precision is achieved by fabricating a master using the LiGA process. The molds made from the master are then filled with powder of the desired material to form parts that are then released from the mold and sintered to high density. Currently, molds are made of either poly(methyl)methacrylate (PMMA) or poly(dimethylsiloxane) (silicone rubber, PDMS). The PMMA molds must be dissolved to release the parts using a solvent that limits the choice of binder used to hold together the powder in the part. The PDMS molds are soft and therefore not suitable for lapping the parts prior to removal from the mold. Recently, two new types of molds materials have been investigated that can be removed utilizing a phase change, either melting or sublimation. The development of these new mold materials, which allow a wider choice of binders, will be described.
机译：微成型是一种最新开发的技术，用于制造毫米尺寸范围内的零件，其最小特征和尺寸公差小于10μm。这种精确度是通过使用LiGA工艺制造母版来实现的。然后，将由母模制成的模具填充所需材料的粉末，以形成零件，然后将这些零件从模具中取出并烧结至高密度。当前，模具由聚甲基丙烯酸甲酯（PMMA）或聚二甲基硅氧烷（硅橡胶，PDMS）制成。必须使用一种溶剂溶解PMMA模具以释放零件，该溶剂限制了将零件中的粉末保持在一起的粘合剂的选择。 PDMS模具较软，因此不适合在从模具中取出之前对零件进行研磨。最近，已经研究了两种新型的模具材料，这些材料可以利用融化或升华的相变去除。将描述这些新的模具材料的发展，这些材料允许更多的粘合剂选择。

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