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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >Modeling Combined Thermal, Electrical, Optical and Mechanical Response for MEMS Spectroscopic Gas Sensor Based On Photonic Crystals
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Modeling Combined Thermal, Electrical, Optical and Mechanical Response for MEMS Spectroscopic Gas Sensor Based On Photonic Crystals

机译：基于光子晶体的MEMS光谱气体传感器的热，电，光和机械综合响应建模

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摘要

A new type of gas sensor was developed that combines the principles of bolometric infrared detectors with photonic crystals. This paper describes a quantitative model used to optimize the materials, geometry, and electrical properties of this suspended membrane MEMS device. Fundamentally the model is concerned with the thermal response of the device using temperature dependent thermal conductivity, specific heat, and electrical resistance to calculate conduction, convection, and radiation losses for a negative temperature coefficient of resistance material. Variations in the electrical drive circuit, dc and ac response, low and high frequency sinusoidal and random noise, along with an exacting calculation of expected signal were used to improve design. The model follows the time evolution of the system. We show how look-up tables with scaling (derived from exact, off-line finite element models for thermal conduction, spectral emission, etc.) provided sufficiently accurate estimates with rapid calculation to enable running the model on a standard PC type computer. The simulations matched the experimental results, accurately predicted the unstable operating regimes, and maximized the signal to noise ratio for the device.
机译：开发了一种新型的气体传感器，将辐射热红外探测器的原理与光子晶体结合在一起。本文介绍了一种用于优化此悬浮膜MEMS器件的材料，几何形状和电性能的定量模型。从根本上讲，该模型与器件的热响应有关，该器件使用与温度有关的导热系数，比热和电阻来计算电阻材料负温度系数的传导，对流和辐射损耗。电气驱动电路的变化，直流和交流响应，低频和高频正弦波和随机噪声以及对期望信号的精确计算都可以用来改善设计。该模型遵循系统的时间演变。我们展示了按比例缩放的查询表（源自精确的离线有限元模型的热传导，光谱发射等），可以通过快速计算提供足够准确的估计值，以使模型能够在标准PC型计算机上运行。仿真结果与实验结果相符，可以准确预测不稳定的工作状态，并最大程度地提高了设备​​的信噪比。

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