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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >MICROREACTORS FOR THIN-FILM CALORIMETRY
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MICROREACTORS FOR THIN-FILM CALORIMETRY

机译：薄膜量热微反应器

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摘要

We have designed and developed a calorimeter that is capable of measuring the heat released by ultrathin films in the temperature range from 77 to 1050 K. Semiconductor processing techniques are used to fabricate the microreaders. The symmetric design of the Pt heaters in the microreactor channel provide a good temperature profile across the active region of the membrane making it suitable for accurate calorimetric measurements. The low thermal mass of our system allows for a high sensitivity. The effective heat capacity of the microcalorimeters with a 200 nm Si_xN_ymembrane is 0.14 μJ/K at room temperature. In high vacuum heating rates of 2x10~6 K/s have been achieved. Under these conditions the microcalorimeter works as an adiabatic scanning calorimeter and therefore heat capacity is directly obtained from the input power. A thermal characterization of the microcalorimeters in the transient state and calorimetric measurements on indium thin films and films made of CdSe nanocrystals are briefly discussed to show the potentiality of the microreactors.
机译：我们设计并开发了一种量热仪，它能够测量77到1050 K温度范围内的超薄膜释放的热量。半导体加工技术被用于制造微阅读器。微反应器通道中Pt加热器的对称设计在膜的整个作用区域上提供了良好的温度曲线，使其适用于精确的量热测量。我们系统的低热质量允许高灵敏度。具有200 nm Si_xN_ymbrane的微热量计的有效热容量在室温下为0.14μJ/ K。在高真空下，已达到2x10〜6 K / s的加热速率。在这些条件下，微热量计可作为绝热扫描量热仪使用，因此可直接从输入功率获得热容量。简要讨论了在铟薄膜和CdSe纳米晶体制成的薄膜上的瞬态微量热仪的热特性和量热测量，以显示微反应器的潜力。

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