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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >Self-aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes
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Self-aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes

机译：悬浮碳纳米管上制备的自对准分栅电极

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摘要

We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
机译：我们描述了在悬浮多壁碳纳米管结构上自对准分裂栅电极的制造。悬浮的多壁碳纳米管结构用作蒸发掩模，用于沉积金属电极，从而导致形成不连续的导线。由于金属对纳米管表面的不良附着力，纳米管上的金属沉积物会被剥离除去。使用Al牺牲层，可以通过单个光刻步骤从悬浮的碳纳米管制造纳米级的自对准接触电极和控制电极。还显示出该制造技术还可用于形成纳米间隙的接触电极。该技术应证明对制造纳米机电系统有用。

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