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首页> 外文会议>Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines >Investigation of Polymer Micro-Actuators Based on Electrostrictive Poly(vinylidene fluoride-trifluoroethylene) Copolymers
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Investigation of Polymer Micro-Actuators Based on Electrostrictive Poly(vinylidene fluoride-trifluoroethylene) Copolymers

机译：基于电致伸缩聚偏二氟乙烯-三氟乙烯共聚物的微致动器的研究

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摘要

Micromachined actuators based on the electrostrictive P(VDF-TrFE) copolymer, which possesses a high strain (～5%) and high elastic energy density (～ 1 J/cm~3), have been designed and fabricated. The performance of the devices have been characterized and modeled in terms of the properties of the copolymer and dimensions of the devices. The experimental results on the device responses under high AC fields (electrostrictive mode), weak AC fields in DC field biased state, and frequency dependence, are very close to the modeling results. Due to the large field induced strain and high frequency capability of the electrostrictive P(VDF-TrFE), the device possesses the capability of operation at non-resonance mode with high displacement and force output, and hence, the device is capable to be used over a broad frequency range. For example, for a device of 1 mm lateral dimension, the displacement output can reach more than 50 μm and the ratio of the displacement/applied voltage is more than 20 nm/V_(rms). Furthermore, over more than 3 frequency decades (up to 100 kHz), the dispersion of the displacement is less than 20%. The observed performance of the devices indicates that this class of the electrostrictive P(VDF-TrFE) based micro-actuators is attractive for micropumps and valves.
机译：设计并制造了基于电致伸缩P（VDF-TrFE）共聚物的微机械执行器，该执行器具有高应变（〜5％）和高弹性能密度（〜1 J / cm〜3）。装置的性能已经根据共聚物的性质和装置的尺寸进行了表征和建模。在高AC场（电致伸缩模式），DC场偏置状态下的弱AC场以及频率相关性下，器件响应的实验结果与建模结果非常接近。由于电致伸缩P（VDF-TrFE）的大场感应应变和高频能力，该装置具有在非共振模式下工作且具有高位移和力输出的能力，因此该装置可以使用在很宽的频率范围内。例如，对于横向尺寸为1 mm的设备，位移输出可以达到50μm以上，并且位移/施加电压之比超过20 nm / V_（rms）。此外，在超过3个频率十年（最高100 kHz）中，位移的分散度小于20％。观察到的设备性能表明，此类基于电致伸缩P（VDF-TrFE）的微执行器对微型泵和阀门具有吸引力。

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