首页> 外文会议>Nanotechnology III; Proceedings of SPIE-The International Society for Optical Engineering; vol.6591 >Drilled Dielectric Membranes For Highly Resonant Filtering In The Infrared
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Drilled Dielectric Membranes For Highly Resonant Filtering In The Infrared

机译:钻孔介电膜,用于红外中的高共振滤波

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摘要

Subwavelength dielectric and metallic gratings embedded in vacuum can act as highly-resonant spectral filters. We review the theoretical principles for the design of symmetric dielectric and metal gratings to conceive efficient optical filters in the mid and far infrared range, and we show how both resonance width and resonance wavelength can be tuned. We describe an original process for the fabrication of free-standing SiC gratings, and we present the first samples obtained with 10 μm period. Experimental angularly resolved transmission spectra show evidences of their filtering properties.
机译:嵌入真空中的亚波长电介质和金属光栅可以充当高共振光谱滤波器。我们回顾了设计对称介电和金属光栅的理论原理,以构想中红外和远红外范围内的高效光学滤光片,并展示了如何同时调节共振宽度和共振波长。我们描述了独立式SiC光栅制造的原始过程,并介绍了以10μm周期获得的第一批样品。实验的角度分辨透射光谱显示了其过滤特性的证据。

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