首页> 外文会议>Nanotechnology Materials and Devices Conference, 2006 IEEE >Characterization of domain switching behavior of MTJ cells using magnetic force microscopy(MFM) and H-R loop analysis
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Characterization of domain switching behavior of MTJ cells using magnetic force microscopy(MFM) and H-R loop analysis

机译:使用磁力显微镜(MFM)和H-R回路分析表征MTJ细胞的域切换行为

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Correlationship between electrical and magnetic properties of magnetic tunnel junction (MTJ) for Magnetic Random Access Memory(MRAM) was studied. MTJ (Ta/NiFeCr/PtMn/CoFe/Ru/CoFe/AlOx/CoFe/NiFe/Ta) was analyzed utilizing H-R loop and MFM images. We verified that the kink in H-MR loop comes from the vortex domain of free layer. In addition, we also observed a close relationship between domain switching behavior and anomalous H-R curve. These results would be useful for characterization of MTJ cell, thereby optimizing the process to realize the ultra high density MRAM.
机译:研究了用于磁性随机存取存储器(MRAM)的磁性隧道结(MTJ)的电和磁性能之间的相关性。利用H-R回路和MFM图像分析了MTJ(Ta / NiFeCr / PtMn / CoFe / Ru / CoFe / AlOx / CoFe / NiFe / Ta)。我们验证了H-MR回路中的扭结来自自由层的涡旋域。此外,我们还观察到域切换行为与异常H-R曲线之间存在密切关系。这些结果将有助于表征MTJ单元,从而优化实现超高密度MRAM的工艺。

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