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首页> 外文会议>Nanowires and nanotubes - synthesis, properties, devices and energy applications of one-dimensional materials >Effect of Doping on Nanowire Morphology during Plasma-assisted Chemical Vapor Deposition
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Effect of Doping on Nanowire Morphology during Plasma-assisted Chemical Vapor Deposition

机译：等离子体化学气相沉积过程中掺杂对纳米线形貌的影响

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摘要

Morphologies of silicon nanowires grown by plasma-assisted metalorganic chemical vapor deposition were studied in the presence of various dopant precursors. The varied precursors affected the axial and radial growth rates over orders of magnitude where triethylborane showed the strongest enhancements for both axial and radial growth, and triethylarsenic and triethylantimony retarded axial growth. Native oxide thickness is also shown to depend strongly on doping condition resulting in increased oxide thicknesses for increased carrier concentration, using shifts in the measured binding energy of the silicon 2p3/2 state as a proxy for carrier concentration.
机译：在各种掺杂剂前体的存在下，研究了通过等离子体辅助金属有机化学气相沉积法生长的硅纳米线的形貌。各种前体影响轴向和径向生长速率超过一个数量级，其中三乙基硼烷对轴向和径向生长均表现出最强的增强作用，而三乙基砷和三乙基锑则阻碍了轴向生长。天然氧化物的厚度也显示出强烈地依赖于掺杂条件，从而导致了氧化物厚度的增加，从而增加了载流子浓度，使用了硅2p3 / 2态的测量结合能的变化作为载流子浓度的代表。

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  • 会议地点 San Francisco CA(US);San Francisco CA(US);San Francisco CA(US)
  • 作者

    Andrew J. Lohn; Kate J. Norris; Robert D. Cormia; Elane Coleman; Gary S. Tompa; Nobuhiko P. Kobayashi;

  • 作者单位

    Baskin School of Engineering, University of California Santa Cruz, Santa Cruz, CA 94040, USA,Nanostructured Energy Conversion Technology and Research (NECTAR) of Advanced Studies Laboratories (ASL), University of California Santa Cruz and NASA Ames Research Center, Moffett Field CA, 94035, USA;

    Baskin School of Engineering, University of California Santa Cruz, Santa Cruz, CA 94040, USA,Nanostructured Energy Conversion Technology and Research (NECTAR) of Advanced Studies Laboratories (ASL), University of California Santa Cruz and NASA Ames Research Center, Moffett Field CA, 94035, USA;

    Foothill College, Los Altos Hills CA, 94022, USA;

    Structured Materials Industries Inc, Piscataway NJ, 08854, USA;

    Structured Materials Industries Inc, Piscataway NJ, 08854, USA;

    Baskin School of Engineering, University of California Santa Cruz, Santa Cruz, CA 94040, USA,Nanostructured Energy Conversion Technology and Research (NECTAR) of Advanced Studies Laboratories (ASL), University of California Santa Cruz and NASA Ames Research Center, Moffett Field CA, 94035, USA;

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