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The Design of a Noble VCSEL with DOE

机译:具有DOE的贵金属VCSEL的设计

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摘要

A brand-new approach in developing VCSEL lense is presented in this paper. Using the laser process or yellow light lithography process, we can merge semiconductor laser and diffraction optics elements (DOE) to become a single semiconductor optoelectronic device. To match the surface topology of the DOE with the structure of semiconductor laser, the DOE is carved on the SiO_2 layer of the vertical-cavity surface-emitting laser (VCSEL). The chiseled optoelectronic semiconductor element becomes as a DOE-VCSEL device, it has the DOE function to control the emission distribution of the emitting laser.
机译:本文介绍了一种开发VCSEL镜头的全新方法。使用激光工艺或黄光光刻工艺,我们可以将半导体激光和衍射光学元件(DOE)合并为单个半导体光电器件。为了使DOE的表面拓扑与半导体激光器的结构匹配,将DOE刻在垂直腔表面发射激光器(VCSEL)的SiO_2层上。轮廓分明的光电半导体元件成为DOE-VCSEL器件,它具有DOE功能以控制发射激光器的发射分布。

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