• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Novel Optical Systems Design and Optimization X; Proceedings of SPIE-The International Society for Optical Engineering; vol.6668 >A dual channel lens for simultaneous VIS and SWIR imaging in harsh radiation environments
【24h】

A dual channel lens for simultaneous VIS and SWIR imaging in harsh radiation environments

机译：双通道镜头可在恶劣的辐射环境中同时进行VIS和SWIR成像

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Rapid thermal annealing that utilizes broadband flash lamp sources requires optical diagnostics for instantaneous thermal mapping of silicon wafers and its in-situ monitoring during the process. A new split channel optical assembly offering simultaneous imaging via CMOS- and FPA-imager was designed. Reverse telephoto optical design allows distortion of < 2.5% in both imaging paths over the field of view of ±18° with deep field range and no instrument protrusion into the semiconductor process chamber. Application of solarization resistant materials in a first negative group as well as a rugged housing suits the design to optically harsh environments. Additional stray light measures were taken to control heat dissipation inside the narrow lens barrel by the arrangement of refractive surfaces and absorptive baffles. The beam splitter in front of a second positive group is made of silicon, which both provides preliminary spectral filtering in the near infrared through-channel and further extends spectral capabilities of the visible (reflected) channel into UV-B region. Detailed lens performance, manufacturing aspects and other use of the lens - for direct discrimination of water-containing objects from the image pattern are reviewed.
机译：利用宽带闪光灯光源的快速热退火需要光学诊断，以进行硅晶片的即时热成像及其在过程中的现场监控。设计了一种新的分离通道光学组件，该组件可通过CMOS和FPA成像器同时成像。反向远摄光学设计允许在±18°的视场中，在两个成像路径中，在较深的视场范围内，畸变率均小于2.5％，并且没有仪器伸入半导体处理室。在第一个负极组以及坚固的外壳中应用抗日晒材料可以使设计适应光学恶劣的环境。通过设置折射面和吸收性挡板，采取了额外的杂散光控制措施来控制狭窄的镜筒内部的散热。第二个正离子组前面的分束器由硅制成，既可以在近红外直通通道中提供初步的光谱过滤，又可以将可见（反射）通道的光谱能力扩展到UV-B区域。审查了详细的镜头性能，制造方面以及镜头的其他用途-用于直接从图像图案中区分含水物体。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号