• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Optical design and testing VI >Freeform metrology based on phase retrieval and computer-generated hologram
【24h】

Freeform metrology based on phase retrieval and computer-generated hologram

机译：基于相位检索和计算机生成全息图的自由形式计量

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Recently, interferometric null-testing with computer-generated hologram has been proposed as a non-contact and high precision solution to the freeform optics metrology. However, the interferometry solution owns some typical disadvantages such as the strong sensitivity to the table vibrations or temperature fluctuations, which hinders its usage outside the strictly controlled laboratory conditions. Phase retrieval presents a viable alternative to interferometry for measuring wavefront and can provide a more compact, less expensive, and more stable experimental setup. In this work, we propose a novel solution to freeform metrology based on phase retrieval and computer-generated hologram (CGH). The CGH is designed according to the ray tracing method, so as to compensate the aspheric aberration related to the freeform element. With careful alignment of the CGH and the freeform element in the testing system, several defocused intensity images can be captured for phase retrieval. In this paper the experimental results related to a freeform surface with 18×18mm~2 rectangular aperture (its peak-to-valley aspherity equals to 193um) are reported, meanwhile, we also have compared them with the measurement results given by the interferometry solution, so as to evaluate the validity of our solution.
机译：近来，已经提出了利用计算机生成的全息图的干涉式零测试作为自由形式光学计量学的非接触式高精度解决方案。但是，干涉仪解决方案具有一些典型的缺点，例如对工作台振动或温度波动的敏感度很高，这妨碍了其在严格控制的实验室条件下使用。相位检索是干涉测量法测量波前的一种可行选择，并且可以提供更紧凑，更便宜和更稳定的实验设置。在这项工作中，我们提出了一种基于相位检索和计算机生成的全息图（CGH）的自由形式计量学的新颖解决方案。根据射线追踪方法设计CGH，以补偿与自由形式元素有关的非球面像差。通过在测试系统中仔细对准CGH和自由形式元素，可以捕获多个散焦强度图像以进行相位检索。本文报道了一个具有18×18mm〜2矩形孔径的自由曲面（其峰谷周长等于193um）的实验结果，同时，我们还将它们与干涉测量法给出的测量结果进行了比较。 ，以评估我们解决方案的有效性。

著录项

  • 来源
    《Optical design and testing VI》|2014年|92720E.1-92720E.8|共8页
  • 会议地点 Beijing(CN)
  • 作者

    Fa Zeng; Qiaofeng Tan; Yi Liu; Huarong Gu; Zhehai Zhou; Guofan Jin;

  • 作者单位

    State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, 100084, China;

    State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, 100084, China;

    Aviation Key Laboratory of Science and Technology on Precision Manufacturing, China Precision Engineering Institute for Aircraft Industry, Beijing, 100076, China;

    State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, 100084, China;

    Beijing Engineering Research Center of Optoelectronic Information and Instruments, Beijing Information Science and Technology University, Beijing, 100192, China;

    State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, 100084, China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    freeform metrology; phase retrieval; interferometric null-testing; computer generated hologram;

    机译：自由计量相位检索；干涉式零测试计算机生成的全息图;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号