首页> 外文会议>Optical Measurement Systems for Industrial Inspection V pt.1; Proceedings of SPIE-The International Society for Optical Engineering; vol.6616 pt.1 >Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system
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Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system

机译:飞秒频率梳用于线性编码器校准系统的超外差激光干涉仪

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摘要

A super-heterodyne laser interferometer for sub-nanometer length measurement system is proposed. This interferometer has a possibility to realize high resolution by using the self-zooming method and high accuracy by using external cavity diode laser which is stabilized to femtosecond frequency comb(fs-comb) as an optical source. This length measurement system is going to be applied for linear-encoder calibration system for national standards.
机译:提出了一种用于亚纳米长度测量系统的超外差激光干涉仪。该干涉仪可以通过使用自缩放方法来实现高分辨率,并且可以通过使用稳定在飞秒频率梳(fs-comb)的外腔二极管激光器作为光源来实现高精度。该长度测量系统将用于国家标准的线性编码器校准系统。

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