首页> 外文会议>Optical microlithography XXVI >Introducing a Novel Flow to Estimate Challenges Encountered While Transitioning from RET Development to Manufacturable Solution

【24h】

Introducing a Novel Flow to Estimate Challenges Encountered While Transitioning from RET Development to Manufacturable Solution

机译：引入一种新颖的流程来估算从RET开发向可制造解决方案过渡时遇到的挑战

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

Source Mask Optimization (SMO) has become an integral part of resolution enhancement techniques (RET) for almost all critical layers at advanced technology nodes. Over the past couple of years, various flows have emerged for integrating SMO into mainstream RET selection. These flows revolve mainly around clip selection, resist model, verification and analysis metrics, design rule optimization, and so on. There has also been strong emphasis on the quality of mask that is conjugated for source selection process. All these variations in analysis and rigorous simulations for flow selection are critical but they also create a bottleneck in overall RET development. In this paper, we demonstrate an initial RET development flow for 20 nm technology with emphasis on quantifying benefits coming from source and mask. We also report challenges that are encountered in the foundry environment when moving from RET development to production. In conclusion, we demonstrate a reliable solution that could be integrated early in RET development and easily adapted for a production environment.

机译：源掩模优化（SMO）已成为高级技术节点上几乎所有关键层的分辨率增强技术（RET）不可或缺的一部分。在过去的几年中，涌现了各种将SMO集成到主流RET选择中的流程。这些流程主要围绕剪辑选择，抵抗模型，验证和分析指标，设计规则优化等方面。还强烈强调了用于源选择过程的共轭掩模的质量。对于流量选择的分析和严格模拟中的所有这些变化都是至关重要的，但它们也构成了整个RET开发的瓶颈。在本文中，我们演示了针对20 nm技术的初始RET开发流程，重点在于量化源和掩模带来的好处。我们还报告了从RET开发转向生产时在铸造环境中遇到的挑战。总而言之，我们展示了一种可靠的解决方案，该解决方案可以在RET开发的早期集成并且可以轻松地适应生产环境。

著录项

来源
《Optical microlithography XXVI》|2013年|86830K.1-86830K.7|共7页
会议地点 San Jose CA(US)
作者
Jacky Cheng; Robin Chia; Ying Gong; Omar ElSewefy; GekSoon Chua; YeeMei Foong; Aasutosh Dave; Alvin Chua; DongQing Zhang; Vlad Liubich; Pat Lacour; Alex Tritchkov;
展开▼
作者单位

GLOBALFOUNDRIES, Singapore, Singapore 738406;

Mentor Graphics Corp. Fremont, CA 94555;

GLOBALFOUNDRIES, Singapore, Singapore 738406;

Mentor Graphics Corp. Fremont, CA 94555;

GLOBALFOUNDRIES, Singapore, Singapore 738406;

GLOBALFOUNDRIES, Singapore, Singapore 738406;

Mentor Graphics Corp. Fremont, CA 94555;

Mentor Graphics Corp. Fremont, CA 94555;

GLOBALFOUNDRIES, Singapore, Singapore 738406;

Mentor Graphics Corp. Fremont, CA 94555;

Mentor Graphics Corp. Fremont, CA 94555;

Mentor Graphics Corp. Fremont, CA 94555;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词
SMO; mbSRAF; pxOPC; source optimization; RET;

机译：SMO； mbSRAF; pxOPC;源优化；对;

相似文献

外文文献
中文文献
专利

1. Solution processed perovskite incorporated tandem photovoltaics: developments, manufacturing, and challenges [J] . Jayawardena K. D. G. I, Silva S. M., Misra R. K. Journal of Materials Chemistry, C. materials for optical and electronic devices . 2020,第31期

机译：解决方案加工后佩罗夫斯基特因串联光伏：发展，制造和挑战
2. Addressing viral vector manufacturing challenges - innovative solutions in the AAV production workflow [J] . de Rooij J. D., Detmers F., Hermans P., Human gene therapy . 2019,第11期

机译：解决病毒载体制造挑战 - AAV生产工作流程中的创新解决方案
3. 'Oh no, no, no, we haven't got time to be doing that': Challenges encountered introducing a breast-feeding support intervention on a postnatal ward [J] . Hunter Louise, Magill-Cuerden Julia, McCourt Christine Midwifery . 2015,第8期

机译：“哦，不，不，不，我们没有时间这样做”：在产后病房中引入母乳喂养支持干预措施时遇到的挑战
4. Introducing a Novel Flow to Estimate Challenges Encountered While Transitioning from RET Development to Manufacturable Solution [C] . Jacky Cheng, Robin Chia, Ying Gong, Conference on optical microlithography XXVI . 2013

机译：引入新颖的流程来估算从RET开发转换到生产解决方案时遇到的挑战
5. Development of hybrid lifecycle cost estimating tool (HLCET) for manufacturing influenced design tradeoff. [D] . Sirirojvisuth, Apinut. 2012

机译：开发混合生命周期成本估算工具（HLCET），以制造受设计影响的折衷方案。
6. Manufacturing the Gas Diffusion Layer for PEM Fuel Cell Using a Novel 3D Printing Technique and Critical Assessment of the Challenges Encountered [O] . Arunkumar Jayakumar, Sarat Singamneni, Maximiano Ramos, 2017

机译：使用新型3D打印技术制造PEM燃料电池的气体扩散层并对遇到的挑战进行关键评估
7. Common industrial and commercial policy for lead and zinc. Proposal submitted by the Commission for a decision of the Council unifying the Member States' liberalization measures for lead and zinc imports from non-member countries. Proposal for a Council directive on procedure for introducing freedom of establishment and freedom to supply services in respect of self-employed persons in manufacturing activities coming under ISIC Major Groups 23-40 (industrial and artisan activities) (Articles 54 and 63). Proposal for a Council directive on procedure for introducing freedom of establishment and freedom to supply services in respect of self-employed persons in mining and quarrying (ISIC Major Groups 11-19). Proposal for a Council directive detailing transitional measures affecting self-employed persons in manufacturing activities coming under ISIC Major Goups 23-40 (Industrial and artisan activities). Supplement to Bulletin of the European Economic Community No. 5, 1963 [O] . 1963

机译：铅和锌的共同工业和商业政策。委员会提交的关于理事会决定统一成员国从非成员国进口铅和锌的自由化措施的提案。关于在IsIC主要群体23-40（工业和手工业活动）下制造活动中为自营职业者引入自由建立和提供服务自由的程序的理事会指令的提案（第54和63条）。关于关于采矿和采石中自营职业者实行自由建立和提供服务自由程序的理事会指令的提案（IsIC主要组别11-19）。关于理事会指令的提案，详细说明了影响IsIC主要制度活动23-40（工业和工匠活动）的制造业活动中自营职业者的过渡措施。 1963年欧洲经济共同体公报第5号补编

Introducing a Novel Flow to Estimate Challenges Encountered While Transitioning from RET Development to Manufacturable Solution

摘要

著录项

相似文献

相关主题

期刊订阅