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首页> 外文会议>Optical System Alignment and Tolerancing; Proceedings of SPIE-The International Society for Optical Engineering; vol.6676 >Error Analysis and Alignment in the Optical Head of Near Field Recording System
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Error Analysis and Alignment in the Optical Head of Near Field Recording System

机译：近场记录系统光学头的误差分析与对准

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摘要

In this paper, error analysis and alignment for the optical head of Near Field Recording (NFR) system are presented. Using optical systems analysis tool - CODEV, the NFR system are designed. After design, we fabricate the NFR system and test the reading & writing performance of the NFR system. The test results show that the reading & writing performance is not good enough. In order to find the cause of the performance drop in the NFR system, assembly tolerances of the optical head of NFR system are simulated. The simulation results show that the tolerance in the optical head of the NFR system is very tight. So in order to align the optical head within the tolerance limit, we design and fabricate an alignment system which can detect the RMS wavefront aberration and align the optical head. Before the experiment, we model the interferometer (by CODEV) and analyze the interference pattern trend. The interference patterns will be compared with the experiment results. The system can control the position of optical head of the NFR system using the pico-motor actuators and the capacitance type gap sensors. Using the system, we can align the objective lens and the solid immersion lens in 5-axis. Finally, we verify the alignment performance of the optical head using the alignment system. We can align the optical head within tolerance limit using the proposed system.
机译：本文介绍了近场记录（NFR）系统光学头的误差分析和对准。使用光学系统分析工具CODEV设计了NFR系统。设计完成后，我们制造NFR系统并测试NFR系统的读写性能。测试结果表明读写性能不够好。为了找出NFR系统性能下降的原因，模拟了NFR系统光学头的装配公差。仿真结果表明，NFR系统光学头的公差非常严格。因此，为了使光学头对准公差范围，我们设计并制造了一个对准系统，该系统可以检测RMS波前像差并对准光学头。在实验之前，我们对干涉仪（由CODEV建模）进行建模，并分析干涉图案趋势。将干扰图案与实验结果进行比较。该系统可以使用微电机致动器和电容式间隙传感器控制NFR系统的光学头位置。使用该系统，我们可以将物镜和固体浸没透镜对准5轴。最后，我们使用对准系统验证光学头的对准性能。我们可以使用提出的系统将光学头对准公差范围。

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