No such thing as σ - flowdown and measurement of surface roughness requirements

机译：没有诸如σ之类的东西-流量下降和表面粗糙度要求的测量

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The standard use of the parameter σ for the rms surface roughness of optics has obscured the fact that the effective surface roughness is a function of both the measurement wavelength and bandwidth. A more appropriate method for the flowdown of surface specifications from stray light requirements is presented. Acceptance test methods for validating surface properties of optics using a Zygo NewView Profilometer are also discussed.

机译：参数σ用于光学器件的均方根表面粗糙度的标准用法掩盖了一个事实，即有效表面粗糙度是测量波长和带宽的函数。提出了一种更合适的方法，可根据杂散光的要求降低表面规格。还讨论了使用Zygo NewView轮廓仪来验证光学器件表面特性的验收测试方法。

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来源
《Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II》|2006年|P.62910P.1-62910P.8|共8页
会议地点 San DiegoCA(US)
作者
Michael G. Dittman; Frank Grochocki; Kathleen Youngworth;
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作者单位

Ball Aerospace Technologies Corp., P.O. Box 1062, Boulder, CO, USA 80306-1062;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;
关键词
surface roughness; optics scatter; stray light; PSD; BRDF; sigma;

机译：表面粗糙度;光散射;杂散光; PSD; BRDF;西格玛;

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1. REQUIREMENTS DEVELOPMENT, FLOWDOWN, AND TRACEABILITY [J] . Samuel J Keene Reliability Review: The R & M Engineering Journal . 2007,第3期

机译：需求开发，流程和可追溯性
2. Influence of measurement areas selection on roughness parameters in burnished surfaces measurements [J] . ANETA LETOCHA, TATIANA MILLER, JANUSZ KALISZ Mechanik . 2016,第5a6期

机译：抛光表面测量中测量区域选择对粗糙度参数的影响
3. Surface Roughness and Surface Force Measurement: A Comparsion of Electrostatic Potentials Derived from Atomic Force Microscopy and Electrophoretic Mobility Measurements [J] . Robert F. Considine, Calum J.Drummond Langmuir: The ACS Journal of Surfaces and Colloids . 2001,第25期

机译：表面粗糙度和表面力测量：原子力显微镜和电泳迁移率测量得出的静电势的比较
4. No such thing as σ - flowdown and measurement of surface roughness requirements [C] . Michael G. Dittman, Frank Grochocki, Kathleen Youngworth, Conference on Optical Systems Degradation, Contamination, and Stray Light . 2006

机译：没有像σ - 表面粗糙度要求的流量和测量
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7. Understanding EUV mask blank surface roughness induced LWR and associated roughness requirement [O] . Pei-Yang Yan, Guojing Zhang, Eric M. Gullikson, 2015

机译：了解EUV掩模空白表面粗糙度诱导LWR和相关粗糙度要求

No such thing as σ - flowdown and measurement of surface roughness requirements

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