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首页> 外文会议>Optical Systems Design 2015: Advances in optical thin films V >Optimization of novel phase separating IBS process
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Optimization of novel phase separating IBS process

机译：新型相分离IBS工艺的优化

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摘要

During the last years, optical low loss components gained more and more industrial interest and led to novel approaches for the production in optical coating technology. The application of filtered deposition technologies promises a significant reduction of particle contamination. Usually, filtered techniques are applied in combination with processes which produce a high level of undesired particles, like the cathodic arc deposition. In the present contribution, a magnetic field filter is applied in combination with a high quality ion beam sputtering process. The focus of the investigation constitutes the modulation of the guiding process with respect to the guiding efficiency. Numerical investigations reveal the trajectories of the ions during the guiding process and allow to analyze the influence of the magnetic field and the resulting electrostatic potential. In this study, the guiding effect is observed to be dominated by the electric potential compared to the magnetic field. However according to the simulations, very high ion guiding efficiencies can be achieved using moderate magnetic fields and electrical potentials. Furthermore, it is demonstrated that the experimental and calculated efficiencies agree well. Consequently, the simulation is the basis for a further optimization of the filtered ion beam sputtering processes.
机译：在过去的几年中，光学低损耗组件赢得了越来越多的工业兴趣，并为光学镀膜技术的生产带来了新颖的方法。过滤沉积技术的应用有望大大减少颗粒污染。通常，将过滤技术与产生大量不希望有的颗粒的过程结合使用，例如阴极电弧沉积。在本发明中，结合了高质量离子束溅射工艺应用了磁场过滤器。研究的重点在于指导过程相对于指导效率的调节。数值研究揭示了离子在引导过程中的轨迹，并可以分析磁场的影响和产生的静电势。在这项研究中，与磁场相比，观察到的引导作用主要由电位决定。然而，根据模拟，使用适度的磁场和电势可以实现非常高的离子引导效率。此外，证明了实验和计算效率很好地吻合。因此，模拟是进一步优化过滤后的离子束溅射工艺的基础。

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