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首页> 外文会议>Optics and measurement confercnec 2014 >Air flow and length noise in displacement interferometry
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Air flow and length noise in displacement interferometry

机译：位移干涉法中的气流和长度噪声

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摘要

We report on an evaluation of the influence that fast changes of the refractive index has on the uncertainty of interferometric displacement measurement. Measurement of position within a limited range is typical for coordinate measuring systems such as nanometrology standards combining scanning probe microscopy (SPM) with precise positioning. For long-range systems the varying refractive index of air contributes the most to the overall uncertainty. We proposed to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. In this contribution we evaluate the level of uncertainty associated with the nature of the fluctuations of the refractive index of air in laser interferometry. We have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path but play a significant role only over distances longer than 50 mm. Over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.
机译：我们报告了对折射率的快速变化对干涉式位移测量不确定度的影响的评估。坐标范围内的位置测量通常用于坐标测量系统，例如将扫描探针显微镜（SPM）与精确定位相结合的纳米计量标准。对于远程系统，变化的空气折射率对整体不确定性影响最大。我们提出了通过监测位移测量干涉仪的测量范围内的光学长度来扩展补偿空气折射率波动的原理。在这一贡献中，我们评估了与激光干涉术中空气折射率波动性质相关的不确定性水平。我们已经观察到，它的快速变化（被视为长度噪声）与测量光束路径不成线性比例，但仅在超过50 mm的距离上才起重要作用。在更长的距离上，长度噪声成比例地增加。测量是在计量SPM系统的典型条件下进行的。

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  • 来源
    《Optics and measurement confercnec 2014》|2014年|94420D.1-94420D.7|共7页
  • 会议地点 Liberec(CZ)
  • 作者

    Miroslava Hola; Ondrej Cip; Martin Sarbort; Josef Lazar;

  • 作者单位

    Institute of Scientific Instruments of the AS CR, v. v. i., Kralovopolska 147, 612 64 Brno, Czech Republic;

    Institute of Scientific Instruments of the AS CR, v. v. i., Kralovopolska 147, 612 64 Brno, Czech Republic;

    Institute of Scientific Instruments of the AS CR, v. v. i., Kralovopolska 147, 612 64 Brno, Czech Republic;

    Institute of Scientific Instruments of the AS CR, v. v. i., Kralovopolska 147, 612 64 Brno, Czech Republic;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    refractometry; refractive index of air; interferometer; measuring system;

    机译：验光仪空气的折射率干涉仪测量系统;

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