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Application of magnetron-sputtering-obtained Ce-Zr-O2-x-oxide thin layers to gas detection

机译:磁控溅射Ce-Zr-O2-x-氧化物薄层在气体检测中的应用

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Abstract: Thin layers of Ce-Zr-O$-2$MIN@x$/ with varied chemicaland phase composition were deposited by magnetronsputtering with pulse power supply system. The phasetransition in the function of temperature andadditionally during hydrogen treatment were studied.The variation of resistivity of such layers was foundduring changing of the gas atmosphere. By comparison,the properties of thin films prepared by sol-gel methodwere also studied.!10
机译:摘要:用脉冲电源系统磁控溅射沉积了具有不同化学和相组成的Ce-Zr-O $ -2 $ MIN @ x $ /薄层。研究了温度和氢处理过程中的相变。随着气体气氛的变化,发现了这些层的电阻率变化。通过比较,还研究了通过溶胶-凝胶法制备的薄膜的性能。!​​10

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