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A detection and control method of resin liquid-level of Stereolithography Apparatus

机译：光刻设备中树脂液位的检测与控制方法

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摘要

A set of laser detecting system for liquid-level with inclination measurement-based high-resolution and a sinking-block device are developed to detect and control the liquid-level of Stereolithography Apparatus precisely. A brightness-variable laser source is adopted to eliminate the computational error of divider, a closed-loop circuit is set to measure the terminal voltage directly which proportional to the output current of PSD, and hence the position of laser beam can be indicated accurately. A sinking-block device is employed to control the liquid level. The precise calibration result of this detecting device indicates that the resolution of the liquid-level detection can reach ±1.5μm. Compared with overflow liquid-level control, this liquid-level control device of sinking-block style can allow the liquid-level wave reduce from ±45μm to ±15μm. This system works stable with the high precision and antijamming ability. It has applied successfully in Stereolithography Apparatus.
机译：开发了一套基于倾斜度测量的高分辨率液位激光检测系统和沉没装置，以精确检测和控制立体光刻设备的液位。采用亮度可变的激光源消除分频器的计算误差，设置闭环电路直接测量与PSD输出电流成正比的端电压，从而可以准确指示激光束的位置。下沉装置用于控制液位。该检测装置的精确校准结果表明液位检测的分辨率可以达到±1.5μm。与溢流液位控制相比，该沉没式液位控制装置可使液位波动从±45μm减小至±15μm。该系统工作稳定，精度高，抗干扰能力强。它已成功应用于立体光刻设备中。

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  • 来源
  • 会议地点 Beijing(CN)
  • 作者

    Wang Yiqing; Zhao Wanhua; Shi Leping; Lu Bingheng;

  • 作者单位

    State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University, Xi'an, Shaanxi, 710049 Shaanxi Provincial Institute of Metrology, Xi'an, Shaanxi, 710049;

    State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University, Xi'an, Shaanxi, 710049 Shaanxi Provincial Institute of Metrology, Xi'an, Shaanxi, 710049;

    State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University, Xi'an, Shaanxi, 710049 Shaanxi Provincial Institute of Metrology, Xi'an, Shaanxi, 710049;

    State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University, Xi'an, Shaanxi, 710049 Shaanxi Provincial Institute of Metrology, Xi'an, Shaanxi, 710049;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    rapid prototyping; laser; liquid level detecting; liquid level control;

    机译：快速成型；激光;液位检测液位控制;

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