• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Photoelectronic Detection and Imaging: Technology and Applications '93 >Another definition of resolution for the electron microscope
【24h】

Another definition of resolution for the electron microscope

机译：电子显微镜分辨率的另一种定义

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Abstract: Resolution of an electron microscope is often estimated by adding the aberrations of the optical system in quadrature with the diffraction disk and the source size. It is known that this is not particularly accurate and that it is not really theoretically justified. In the case of large aberrations, such as when the beam limiting aperture angle is large, there is the possibility of ambiguity in the estimate of system performance because the optical transfer function may have significant structure. It was shown by Fellgett and Linfoot together, and by Linfoot alone, that it is possible to define the information transmitting capacity of an optical system in terms of the optical transfer function. If one makes use of their result then the resolution of an optical system can be defined by comparing it with the resolution of a diffraction limited system having the same information transmitting capacity. The method gives results that agree well with measurements made on a high resolution scanning electron microscope. In addition, it emphasizes the importance of the current density distribution for understanding the performance on an electron (or ion) optical instrument. !11
机译：摘要：电子显微镜的分辨率通常是通过将光学系统的像差与衍射盘和光源尺寸相加而得出的。众所周知，这不是特别准确，并且在理论上也没有合理的理由。在大像差的情况下，例如当光束限制孔径角很大时，由于光学传递函数可能具有显着的结构，因此在系统性能的估计中可能会有歧义。 Fellgett和Linfoot一起，或者单独由Linfoot证明，可以根据光学传递函数来定义光学系统的信息传输能力。如果利用它们的结果，则可以通过将光学系统的分辨率与具有相同信息传输能力的衍射受限系统的分辨率进行比较来定义光学系统的分辨率。该方法得出的结果与高分辨率扫描电子显微镜上的测量结果非常吻合。此外，它强调了电流密度分布对于理解电子（或离子）光学仪器性能的重要性。 ！11

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号