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Integrated photonics put at full stretch: flexible and stretchable photonic devices enabled by optical and mechanical co-design

机译:集成光子技术全力以赴:通过光学和机械协同设计实现的柔性和可拉伸光子设备

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摘要

We present recent development on integrated flexible and stretchable photonic devices. Conventional photonic devicesare fabricated on rigid semiconductor or dielectric substrates and are therefore inherently incompatible with softbiological tissues. Recently, we have developed a suite of active and passive photonic devices and systems integrated onplastic substrates which can be bent, twisted, and stretched without compromising their optical performance. Keyinnovations are monolithic multi-material integration and advanced micro-mechanical structures co-designed withphotonic devices, which enables devices with extreme mechanical flexibility and excellent optical performance.
机译:我们介绍了集成的柔性和可拉伸光子器件的最新发展。传统的光子器件没有在刚性半导体或介电基片上制造,因此与软生物组织固有地不兼容。最近,我们开发了一套集成在塑料衬底上的有源和无源光子器件和系统,可以弯曲,扭曲和拉伸它们,而不会影响其光学性能。关键创新是与光子器件共同设计的单片多材料集成和先进的微机械结构,从而使器件具有极高的机械灵活性和出色的光学性能。

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    Department of Materials Science Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA;

    Department of Materials Science Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA;

    Department of Aerospace Engineering and Engineering Mechanics, University of Texas at Austin, Austin, Texas, USA;

    Department of Materials Science Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA Department of Electronic Engineering, Xiamen University, Xiamen, China;

    Department of Materials Science Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA Key Laboratory of Optoelectronic Technology System, Education Ministry of China, Chongqing University, Chongqing, China;

    Department of Materials Science Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA;

    Centre for Nanoscience and Nanotechnology, CNRS, Univ. Paris-Sud, Universite Paris-Saclay, C2N – Orsay, Orsay cedex, France;

    Centre for Nanoscience and Nanotechnology, CNRS, Univ. Paris-Sud, Universite Paris-Saclay, C2N – Orsay, Orsay cedex, France;

    The College of Optics Photonics, University of Central Florida, Orlando, Florida, USA;

    The College of Optics Photonics, University of Central Florida, Orlando, Florida, USA;

    Department of Aerospace Engineering and Engineering Mechanics, University of Texas at Austin, Austin, Texas, USA;

    Department of Materials Science Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA;

    Department of Materials Science Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA;

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