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Study of Thin Films of LiNbO_3 Using FTIR and Raman Spectroscopy

机译：FTIR和拉曼光谱研究LiNbO_3薄膜

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摘要

Lithium niobate (LiNbO_3) is a material which can be used in many applications. LiNbO_3 thin films were studied for the development of doped planar waveguides using Pulsed Laser Deposition (PLD) method from two targets. The films were deposited by PLD on SiO_2/Si and (0001) sapphire substrates at temperatures 650℃, 700℃, 750℃, from one crystalline and two sintered LiNbO_3 targets using KrF excimer laser. The film thickness was ~680 nanometers. Two techniques -Fourier Transform Infrared Spectroscopy (FTIR) and Raman Spectroscopy - are used to characterize the dependence of the deposited thin films on the deposition conditions. These methods characterize the materials by monitoring their phonons whose spectra are sensitive to film deposition parameters. Bulk LiNbO_3 has rhombohedral crystal structure with two chemical units per primitive cell, it means, that 30 degrees of freedom are distributed between A_1 and E irreducible representations. The precise assignment of phonon modes, however, has not been unambiguously established. So, we use the spectra for qualitative comparison of the conditions of deposition. The spectra on SiO_2/Si substrates of the same temperatures are essentially the same, indicating good reproducibility of the deposition process, but the spectra are shifted in case of different targets. The spectra of the samples deposited from the powder target or magnetron target are shifted to lower wavenumbers. This implies that different targets have an impact on the film growth. The deposition temperature also influences the spectra. The same is valid for films prepared on (0001) sapphire substrates. The bands shift with increasing temperature.
机译：铌酸锂（LiNbO_3）是可用于许多应用的材料。研究了LiNbO_3薄膜在两个目标靶上采用脉冲激光沉积（PLD）方法开发掺杂平面波导的方法。使用KrF受激准分子激光通过PLD在一个晶体和两个烧结LiNbO_3靶上，分别在650℃，700℃，750℃的温度下，在SiO_2 / Si和（0001）蓝宝石衬底上沉积薄膜。膜厚度为〜680纳米。两种技术-傅立叶变换红外光谱（FTIR）和拉曼光谱-用于表征沉积薄膜对沉积条件的依赖性。这些方法通过监测其声子对光谱沉积参数敏感的声子来表征材料。块状LiNbO_3具有菱形的晶体结构，每个原始单元具有两个化学单元，这意味着在A_1和E的不可约表示之间分布了30个自由度。但是，声子模式的精确分配尚未明确地确定。因此，我们使用光谱对沉积条件进行定性比较。在相同温度下的SiO_2 / Si衬底上的光谱基本相同，表明沉积过程具有良好的可重复性，但是在不同目标的情况下，光谱会发生偏移。从粉末靶或磁控靶沉积的样品的光谱偏移到较低的波数。这意味着不同的目标会影响薄膜的生长。沉积温度也影响光谱。这对于在（0001）蓝宝石衬底上制备的膜同样有效。带随温度升高而移动。

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  • 来源
    《Photonics, devices, and systems V》|2011年|p.830611.1-830611.6|共6页
  • 会议地点 Prague(CS)
  • 作者

    Marketa Zezulova; Miroslav Jelinek; Vladimir Zelezny; Tomas Kocourek;

  • 作者单位

    Czech Technical University in Prague, Faculty of Biomedical Engineering, nam. Sitna 3105, 27201 Kladno, Czech Republic;

    Czech Technical University in Prague, Faculty of Biomedical Engineering, nam. Sitna 3105, 27201 Kladno, Czech Republic,Institute of Physics ASCR, Na Slovance 2,182 21 Prague 8, Czech Republic;

    Institute of Physics ASCR, Na Slovance 2,182 21 Prague 8, Czech Republic;

    Institute of Physics ASCR, Na Slovance 2,182 21 Prague 8, Czech Republic;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程光学;
  • 关键词

    LiNbO_3; thin films; FTIR spectroscopy; raman spectroscopy;

    机译：LiNbO_3；薄膜； FTIR光谱；拉曼光谱;

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