Precision cylindrical optics is in high demand. This is mainly driven by the needs of the semiconductor industry. The quality level requirements cannot be met by of-the-shelf cylinder components, which typically offer a surface deviation of PV～λ/2 @632.8 nm, are characterized using a reference glass only. In the following, JENOPTIK's capabilities to reduce surface shape deviation of cylinder optics and their characterization are demonstrated. Surface shape quality in the range of PV～λ/10 @632,8 nm for cylindrical lenses can be achieved through computer aided correction using mrf-polishing techniques which is supported by an interferometer test set-up. For this method, the polishing machine is equipped with an additional motion axis. Interferometric measurement for residual surface deviation is supported by "Computer Generated Holograms" (CGH) which are designed and manufactured in-house. CGHs from JENOPTIK achieve high numerical apertures for testing cylindrical lenses with f-numbers smaller than F# 1.0. The CGH can accommodate typical rectangular geometries of cylinder components. Using these measurement techniques, testing is no longer a limiting factor where high quality cylindrical surfaces have to be obtained. JENOPTIK has all the capabilities for effective testing and fabrication of cylindrical lenses. Latest results achieved in series production are shown.
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