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Development of novel Al doped zinc oxide film and its application to solar cells

机译:新型铝掺杂氧化锌薄膜的研制及其在太阳能电池中的应用

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We have developed novel Al doped zinc oxide (AZO) films, AZO-X films, using d.c. magnetron sputtering process and have investigated their electro-optical properties and their surface morphology. AZO-X films showed a good balance between the transmittance in near-infrared area and the durability under 85°C-85%RH condition. And AZO-X film also had higher haze value after wet chemical etching than the value obtained in normal AZO film. Furthermore, AZO-X films have been applied to amorphous Si (a-Si) single-type solar cells as the front electrodes. The efficiency as high as 10.1% with high short-circuit current has been obtained, showing that this novel AZO-X is the new promising material for front electrode of a-Si solar cells.
机译:我们已经使用dc技术开发了新型的Al掺杂氧化锌(AZO)膜,AZO-X膜。磁控溅射工艺并研究了它们的电光性能和表面形态。 AZO-X膜在近红外区域的透射率与85°C-85%RH条件下的耐久性之间表现出良好的平衡。而且,AZO-X膜在湿法化学蚀刻后的雾度值也比普通AZO膜中的雾度值高。此外,AZO-X膜已经被应用于非晶硅(a-Si)单型太阳能电池作为前电极。在高短路电流的情况下,效率已高达10.1%,这表明该新型AZO-X是用于a-Si太阳能电池前电极的新型有前途的材料。

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