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首页> 外文会议>Plasma deposition and treatment of polymers >ULTRA HIGH RATE, WIDE AREA, PLASMA POLYMERIZED FILMS FROM HIGH MOLECULAR WEIGHT/LOW VAPOR PRESSURE LIQUID OR LIQUID/SOLID SUSPENSION MONOMER PRECURSORS
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ULTRA HIGH RATE, WIDE AREA, PLASMA POLYMERIZED FILMS FROM HIGH MOLECULAR WEIGHT/LOW VAPOR PRESSURE LIQUID OR LIQUID/SOLID SUSPENSION MONOMER PRECURSORS

机译：高分子量，低​​蒸气压液体或液体/固体悬浮单体前体的超高速率，宽幅，等离子聚合物薄膜

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摘要

A new process has been developed for the high rate vacuum deposition of solid films from high molecular weight/low vapor pressure liquid, or even liquid/solid suspension, monomer precursors. The gas resulting from the flash evaporation of a liquid monomer mixture, or from a suspension of insoluble solid particles in liquid monomer, is used as the support medium for a glow discharge in a Plasma Enhanced Chemical Vapor Deposition-like (PECVD) process. Due to the high molecular weight/low vapor pressure nature of the precursors, the plasma of the flash evaporated gas cryo-condenses at extremely high rate on substrates at ambient, and higher, temperatures. Upon condensation the liquified plasma immediately begins to polymerise to form a solid film due to the high concentration of radicals and ions contained in the liquid film. The process has been successfully implemented in a vacuum roll coating system in a roll-to-roll deposition process. Polymer films, Molecularly Doped Polymer (MDP) composite films of polymer containing light emitting organic molecules, and MDP composite films of polymer containing organic dye molecules have been deposited at thicknesses ranging from 0.1 microns to 24 microns at webs speeds as high as 96 linear meters per minute. This new deposition process will be discussed along with some properties of the films fabricated with this new process.
机译：已经开发出一种新方法，用于从高分子量/低蒸气压的液体，甚至是液体/固体悬浮液的单体前体中高速沉积固体膜。由液态单体混合物的闪蒸或液态单体中不溶性固体颗粒的悬浮液产生的气体，在等离子体增强化学气相沉积（PECVD）工艺中用作辉光放电的载体。由于前体的高分子量/低蒸气压特性，在环境温度及更高温度下，闪蒸气体的等离子体以极高的速率在基板上低温冷凝。冷凝后，由于液膜中所含的自由基和离子的浓度很高，液化的等离子体立即开始聚合形成固体膜。该方法已在卷对卷沉积过程中的真空辊涂系统中成功实施。聚合物薄膜，包含发光有机分子的聚合物的分子掺杂聚合物（MDP）复合膜以及包含有机染料分子的聚合物的MDP复合膜以高达96线性米的网速沉积在0.1微米至24微米的厚度范围内每分钟。将讨论这种新的沉积工艺以及用该新工艺制造的薄膜的某些性能。

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  • 来源
  • 会议地点 Boston MA(US)
  • 作者

    J.D. Affinito; M.E. Gross; P.A. Mounier; M-K Shi; G.L. Graff;

  • 作者单位

    Pacific Northwest National Laboratory, Battelle Boulevard, MS K3-59, Richland, Wa., 99352;

    Pacific Northwest National Laboratory, Battelle Boulevard, MS K3-59, Richland, Wa., 99352;

    Pacific Northwest National Laboratory, Battelle Boulevard, MS K3-59, Richland, Wa., 99352;

    Pacific Northwest National Laboratory, Battelle Boulevard, MS K3-59, Richland, Wa., 99352;

    Pacific Northwest National Laboratory, Battelle Boulevard, MS K3-59, Richland, Wa., 99352;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 高分子材料;
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