Deep Trench Etching in Macroporous Silicon - Application to Photonic Crystal Gas Sensing

机译：大孔硅中的深沟槽蚀刻-在光子晶体气体传感中的应用

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

We present a method to create at the same time trenches and ordered macropore arrays during photo-electrochemical etching of n-type silicon. This novel method allows in situ separation of single devices with a submicrometer precision. The limits of this new process are simulated using electrostatic models and are verified experimentally. This new techniques enables new device structures in macroporous silicon in the areas of photonics, sensing and electronics, as an example an photonic crystal gas sensor is shown.

机译：我们提出了一种在n型硅的光电化学蚀刻过程中同时创建沟槽和有序大孔阵列的方法。这种新颖的方法允许以亚微米精度原位分离单个设备。使用静电模型模拟了这一新工艺的极限，并通过实验进行了验证。这项新技术可以在光子学，传感和电子学领域的大孔硅中实现新的器件结构，例如，以光子晶体气体传感器为例。

著录项

来源
《Porous Semiconductors: A Symposium Held in Memory of Vitali Parkhutik and Volker Lethmann》|2008年|61-67|共7页
会议地点 HonoluluHI(US);Volker Lehmann and Vitali Parkhutik(US)
作者
R. B. Wehrspohn; S. L. Schweizer; T. Geppert; A. Lambrecht;
展开▼
作者单位

Department of Physics, University of Halle, 06099 Halle, Germany;

Department of Physics, University of Halle, 06099 Halle, Germany;

Department of Physics, University of Halle, 06099 Halle, Germany;

Fraunhofer Institute for Physical Measurement, Heidenhofstr. 8, 79110 Freiburg, Germany;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类表面处理;
关键词

相似文献

外文文献
中文文献
专利

1. Enhanced geometries of macroporous silicon photonic crystals for optical gas sensing applications [J] . Cardador D., Vega D., Segura D., Photonics and Nanostructures: Fundamentals and Applications . 2017,第期

机译：用于光学气体传感应用的大孔硅光子晶体的增强几何形状
2. Deep trench etching in macroporous silicon [J] . T. GEPPERT, S.L. SCHWEIZER, U. GOESELE, Applied Physics. A, Materials Science & Processing . 2006,第3期

机译：大孔硅中的深沟槽刻蚀
3. Focused-ion-beam etching in macroporous silicon to realize three-dimensional photonic crystals [J] . Wang K., Rowson S., Garoche P., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2000,第20期

机译：在大孔硅中聚焦离子束蚀刻以实现三维光子晶体
4. Deep Trench Etching in Macroporous Silicon - Application to Photonic Crystal Gas Sensing [C] . R. B. Wehrspohn, S. L. Schweizer, T. Geppert, Meeting of the Electrochemical Society . 2008

机译：大孔硅中深沟蚀刻 - 光子晶体气体传感的应用
5. Design and manipulation of one-dimensional rugate photonic crystals of porous silicon for chemical sensing applications. [D] . King, Brian Henry. 2010

机译：用于化学传感应用的多孔硅一维波形光子晶体的设计和操纵。
6. Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method [O] . Zhiya Dang, Mark BH Breese, Gonzalo Recio-Sánchez, 2012

机译：质子束写入结合电化学刻蚀法制备的硅基光子晶体
7. Enhanced geometries of macroporous silicon photonic crystals for optical gas sensing applications [O] . Cardador Maza, David, Vega d'Aurelio, Davide, Segura García, Daniel, 2017

机译：用于光学气体传感应用的增强的大孔硅光子晶体几何形状

Deep Trench Etching in Macroporous Silicon - Application to Photonic Crystal Gas Sensing

摘要

著录项

相似文献

相关主题

期刊订阅