Electrochemical Formation of Self-Positioned Nano-Sized Pores on Oxidized Porous Silicon Substrate

著录项

• 来源
  《Porous Semiconductors: A Symposium Held in Memory of Vitali Parkhutik and Volker Lethmann》|2008年|201-207|共7页
• 会议地点 HonoluluHI(US);Volker Lehmann and Vitali Parkhutik(US)
• 作者

  D. H. Ge; J. W. Jiao; X. Q. Bao; S. Zhang; P. Zhou; Y. L. Wang; S. L. Feng;

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• 作者单位

  State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

  State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

  State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

  State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

  State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 表面处理;
• 关键词