首页> 外文会议>Porous Semiconductors: A Symposium Held in Memory of Vitali Parkhutik and Volker Lethmann >Stabilization of Porous Silicon Free-Standing Coupled Optical Microcavities by Surface Chemical Modification
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Stabilization of Porous Silicon Free-Standing Coupled Optical Microcavities by Surface Chemical Modification

机译:通过表面化学改性稳定多孔硅自由站立耦合光学微腔

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摘要

As-anodized porous Si photonic structures experience drifts of their optical properties upon prolonged exposure to air due to spontaneous oxidation of the metastabe Si-H bonds terminating the pores surface. This is a critical limitation in the case of optical coupled optical microcavities, where both long terra usage and stable nanometer resolution are required. With a view to stabilizing these structures, the surface of porous Si was chemically modified by hydrosilylation. The resulting surfaces are protected by stable Si-C bonds and by a steric hinderance mechanism. The modified photonic structures are stable for many months.
机译:阳极氧化的多孔Si光子结构由于暴露于孔表面的metastabe Si-H键自发氧化而长时间暴露于空气中时,其光学性能会发生漂移。在光耦合光学微腔的情况下,这是一个关键的限制,在这种情况下,需要长期使用Terra和稳定的纳米分辨率。为了稳定这些结构,通过氢化硅烷化对多孔硅的表面进行了化学改性。产生的表面受到稳定的Si-C键和位阻机制的保护。修改后的光子结构可以稳定多个月。

著录项

  • 来源
  • 会议地点 HonoluluHI(US);Volker Lehmann and Vitali Parkhutik(US)
  • 作者单位

    Graduate School of Eng., Tokyo Univ. of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan;

    Graduate School of Eng., Tokyo Univ. of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan;

    Graduate School of Eng., Tokyo Univ. of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan;

    Micro-Technology Lab., FBK - Inst. Sci. Res. Technol., 38050 Povo (Trento), Italy;

    INFM and Dipartiraento di Fisica, University of Trento, 38050 Povo (Trento), Italy;

    National Research Council of Canada, Ottawa, Ontario, K1A 0R6, Canada;

    Graduate School of Eng., Tokyo Univ. of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 表面处理;
  • 关键词

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