A Novel GAS Sensor for Hydro-Carbons Detection Based on Porous Silcon Permeaated with SN-V Mixed Oxides

机译：基于多孔硅与AN-V混合氧化物渗透的新型用于油气检测的GAS传感器

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The characteristics of an innovative chemical gas sensor device made of a macroporous silicon substrate hosting a thin layers of Sn-V mixed oxides ae presented .A wet permeatio technique has been used to induce co-precipitation of V and Sn oxohydrates providing a conformal coverage of the macroporous structure by the thin sensing film. The grain size and the chemical composition of the Sn-V polycrystalline oxide layer have been investigated and the experimental data are reported. Moreover, results on the sensitivity of a Sn-O-V permeated porous silicon device to C_6H_6 CH_3OH and CO gases are shown and compared.

机译：提出了一种创新的由大孔硅衬底制成的化学气体传感器设备的特性，该衬底上沉积有薄薄的Sn-V混合氧化物ae。湿渗透技术已被用来诱导V和Sn氧水合物的共沉淀，从而保形覆盖了薄膜形成大孔结构。研究了Sn-V多晶氧化物层的晶粒尺寸和化学成分，并报告了实验数据。此外，示出并比较了Sn-O-V渗透的多孔硅器件对C_6H_6 CH_3OH和CO气体的敏感性的结果。

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《Proceedings of the 27th European solid-state device research conference》|1997年|p.684-687|共4页
会议地点 Stuttgart(DE);Stuttgart(DE)
作者
R.Angelucci; A.Poggi; C.Critelli; L.Dori; F.Cavani; A.Parisini; A.Garulli; G.C.Cardinali; M.Fiorni;
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正文语种 eng
中图分类无线电电子学、电信技术;
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A Novel GAS Sensor for Hydro-Carbons Detection Based on Porous Silcon Permeaated with SN-V Mixed Oxides

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