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On Tool Wear in Rotary Tool Micro-Ultrasonic Machining

机译:旋转刀具微超声加工中的刀具磨损

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Micro-ultrasonic machining (micro-USM) is used to fabricate complex micro-features in brittle and hard materials. In micro-USM, both dimensional and form accuracy of machined component depend mainly on the shape of the tool. However, tool wear is an unavoidable phenomenon of this process, which affect the accuracy of micro-feature. The tool suffers by three types of wear (longitudinal, lateral and edge wear) in micro-USM. Accumulation of micro-chips and abrasives in the machining gap (between tool and workpiece) are the main reasons responsible for severe tool wear in micro-USM. This article reports on a new method named as rotary tool micro-USM to reduce tool wear. The rotary tool micro-USM involves abrasive slurry with providing simultaneous rotation and vibration to the tool. Rotation of the tool helped abrasives to replenish from the machining gap easily. Micro-channels were fabricated and characterized by using stereo microscope. From the results, it was found that rotary tool micro-USM resulted in very less tool wear and as a result of that micro-channels of better dimensional and form accuracy were developed.
机译:微超声加工(micro-USM)用于在脆性和硬质材料中制造复杂的微特征。在微型USM中,加工零件的尺寸和形状精度主要取决于工具的形状。但是,工具磨损是该过程中不可避免的现象,这会影响微特征的精度。在微型USM中,该工具遭受三种磨损(纵向,横向和边缘磨损)。微型USM中导致严重磨损的主要原因是微细屑和磨料在加工间隙(刀具和工件之间)中的积累。本文报告了一种称为旋转刀具微型USM的新方法,可以减少刀具磨损。微型微型USM旋转工具涉及磨料浆,可同时为工具提供旋转和振动。工具的旋转帮助磨料容易地从加工间隙中补充。通过使用体视显微镜来制造和表征微通道。从结果中发现,旋转式刀具微型USM导致刀具磨损非常小,并且因此开发了尺寸和形状精度更高的微通道。

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