Remote control of VNA and parameter analyzer for RFCV measurements using Python

机译：使用Python远程控制VNA和参数分析器以进行RFCV测量

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This paper presents the development of capacitance measurement with RF signal (RFCV) for MOSFET. Such technic is fundamental to measure and extract capacitances from nanometric range oxide thickness, which are very leaky in low frequency range measurements. This method uses the control and synchronization of a vector network analyzer (VNA) with a Source Measure Unit (SMU) from a parameter analyzer (PA). The control is established by a remote graphical interface developed in Python. It includes the use of standards like IEEE 488.2, SCPI and Ethernet link protocol. For the RFCV measurements, the SMU provides the DC voltage whereas the VNA the RF signal.

机译：本文介绍了利用RF信号（RFCV）进行MOSFET电容测量的发展。这种技术是从纳米范围的氧化物厚度测量和提取电容的基础，而在低频范围的测量中，这种厚度非常泄漏。此方法使用矢量网络分析仪（VNA）与来自参数分析仪（PA）的源测量单元（SMU）的控制和同步。该控件由Python开发的远程图形界面建立。它包括对IEEE 488.2，SCPI和以太网链接协议等标准的使用。对于RFCV测量，SMU提供DC电压，而VNA提供RF信号。

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来源
《Proceedings of the 2016 IEEE ANDESCON》|2016年|1-4|共4页
会议地点 Arequipa(PE)
作者
Esteban Garzón; Fernando Sanchez; Luis-Miguel Procel; Lionel Trojman;
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作者单位

Colegio de Ciencias e Ingeniería and Institute of Micro and Nanoelectronics (IMNE), Universidad San Francisco de Quito (USFQ), Quito, Ecuador;

Colegio de Ciencias e Ingeniería and Institute of Micro and Nanoelectronics (IMNE), Universidad San Francisco de Quito (USFQ), Quito, Ecuador;

Colegio de Ciencias e Ingeniería and Institute of Micro and Nanoelectronics (IMNE), Universidad San Francisco de Quito (USFQ), Quito, Ecuador;

Colegio de Ciencias e Ingeniería and Institute of Micro and Nanoelectronics (IMNE), Universidad San Francisco de Quito (USFQ), Quito, Ecuador;

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原文格式 PDF
正文语种 eng
中图分类
关键词
Synchronization; Semiconductor device measurement; Frequency measurement; Capacitance; MOSFET; Logic gates; Ports (Computers);

机译：同步;半导体器件测量;频率测量;电容; MOSFET;逻辑门;端口（计算机）;

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1. Uncertainties of Multiport VNA S-Parameter Measurements Applying the GSOLT Calibration Method [J] . Zhao W., Yang X., Xiao J., Instrumentation and Measurement, IEEE Transactions on . 2012,第12期

机译：使用GSOLT校准方法的多端口VNA S参数测量的不确定性
2. Uncertainties of VNA S-Parameter Measurements Applying the TAN Self-Calibration Method [J] . Ulrich Stumper IEEE Transactions on Instrumentation and Measurement . 2007,第期

机译：TAN自校正法测量VNA S参数的不确定性
3. Uncertainties of VNA S-Parameter Measurements Applying the TAN Self-Calibration Method [J] . Stumper U. IEEE Transactions on Instrumentation and Measurement . 2007,第2期

机译：TAN自校正法测量VNA S参数的不确定性
4. Remote control of VNA and parameter analyzer for RFCV measurements using Python [C] . Esteban Garzón, Fernando Sanchez, Luis-Miguel Procel, IEEE ANDESCON Conference . 2016

机译：使用Python进行RFCV测量的VNA和参数分析仪的远程控制
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8. REMOTE: A Means of Remotely Controlling and Storing Data from a HAL QuadrupoleGas Analyzer Using an IBM-PC Compatible Computer (Documentation for Version 2.6) [R] . Kasper, B. P. 1995

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Remote control of VNA and parameter analyzer for RFCV measurements using Python

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