ULTRA-PRECISION LINEAR MOTION METROLOGY OF A COMMERCIALLY AVAILABLE LINEAR TRANSLATION STAGE

著录项

• 来源
  《Proceedings of the Twenty-sixth annual meeting of the American Society for Precision Engineering》|2011年|p.81-84|共4页
• 会议地点 Denver CO(US);Denver CO(US)
• 作者

  Ronnie R. Fesperman; M. Alkan Donmez; Shawn P. Moylan;

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• 作者单位

  Intelligent Systems Division National Institute of Standards and Technology (NIST)* Gaithersburg, MD, USA;

  Intelligent Systems Division National Institute of Standards and Technology (NIST)* Gaithersburg, MD, USA;

  Intelligent Systems Division National Institute of Standards and Technology (NIST)* Gaithersburg, MD, USA;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 机械加工精度理论;
• 关键词