MICROFABRICATION OF TERAHERTZ VACUUM ELECTRONIC DEVICES

著录项

• 来源
  《Proceedings of the Twenty-sixth annual meeting of the American Society for Precision Engineering》|2011年|p.111-114|共4页
• 会议地点 Denver CO(US);Denver CO(US)
• 作者

  Robert A. Barchfeld; Diana Gamzina; Young-Min Shin; Jongsoo Kim; Christopher Alldritt; Larry R. Barnett; Neville C. Luhmann;

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• 作者单位

  Department of Applied Science University of California, Davis Davis, CA, USA;

  Department of Applied Science University of California, Davis Davis, CA, USA;

  Department of Applied Science University of California, Davis Davis, CA, USA;

  Digital Technology Laboratory, Mori Seiki Davis, CA, USA;

  Digital Technology Laboratory, Mori Seiki Davis, CA, USA;

  Department of Applied Science University of California, Davis Davis, CA, USA;

  Department of Applied Science University of California, Davis Davis, CA, USA;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 机械加工精度理论;
• 关键词