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首页> 外文会议>Proceedings of the Twenty-sixth annual meeting of the American Society for Precision Engineering >TOWARDS FIBER-COUPLED DISPLACEMENT MEASURING INTERFEROMETERS
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TOWARDS FIBER-COUPLED DISPLACEMENT MEASURING INTERFEROMETERS

机译：迈向光纤耦合位移测量干涉仪

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摘要

Heterodyne displacement measuring interferometry has been widely used to calibrate other measurement devices such as capacitive sensors, inductive sensors, and optical encoders because of its high dynamic range, high signal-to-noise ratio, and direct traceability to the length standards. The three main error sources that limit the performance of a displacement interferometry system are the laser frequency stability [1], refractive index fluctuations in non-common optical paths [2], and periodic nonlin-earity in the measured phase due to source mixing, manufacturing tolerances, and imperfect alignment [3, 4, 5]. While the effects of the laser frequency stability and refractive index fluctuations can be mitigated by employing a highly stable reference laser and by performing the measurements in a well controlled environment or even vacuum, the periodic nonlinearity is difficult to eliminate.
机译：外差位移测量干涉法因其高动态范围，高信噪比和直接可追溯至长度标准而被广泛用于校准其他测量设备，例如电容传感器，电感传感器和光学编码器。限制位移干涉仪系统性能的三个主要误差源是激光频率稳定性[1]，非公共光路中的折射率波动[2]以及由于光源混合而导致的被测相位的周期性非线性，制造公差和不完全对准[3，4，5]。尽管可以通过使用高度稳定的参考激光器并在良好控制的环境甚至真空中进行测量来减轻激光频率稳定性和折射率波动的影响，但很难消除周期性非线性。

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