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首页> 外文会议>Proceedings vol.2003-29; Epitaxial Growth of Functional Oxides Symposium and Electrochemical Society Meeting; 20031012-17; Orlando,FL(US) >ORIENTATION-CONTROLLED BISMUTH TITANATE THICK FILMS FOR FERRO-AND PIE7O-ELECTRIC APPLICATIONS
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ORIENTATION-CONTROLLED BISMUTH TITANATE THICK FILMS FOR FERRO-AND PIE7O-ELECTRIC APPLICATIONS

机译：用于铁和Pie7O电子应用的方向控制的钛酸铋厚膜

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摘要

The significance of orientation controlled growth and thermal strain induced domain evolution on ferroelectric polarization and electromechanical displacement properties was studied by comparing the growth of Bi_(4-x)Pr_xTi_3O_(12) (BPT, x=0.3, 0.5, 0.7, nominal) both on Pt and Ir sputter-grown bottom electrode layers on Si substrates. On Ir, BPT films exhibited (111)- and (110)-preferred orientation whereas (117)-orientation on Pt. Reflecting the tilt angle between the major spontaneous polarization P_s vector and the preferred axes, BPT films deposited on Ir layers showed remanent polarization P_r 10-20% larger than those in the films on Pt. Furthermore, P_r and the Curie temperature T_c monotonously decreased with increasing x. This fact indicates that substitution of Pr~(3+) for Bi~(3+) degrades ferroelectric polarization property of crystallites. As an ultimate case, we measured a giant polarization 2P_r=92 μC/cm~2 in a BPT film of x=0.3 with 90%-polar-axis orientation. We measured the uniform response of field-induced displacement in BPT films by an AFM. A maximum displacement was measured at x=0.3 and this fact qualitatively agrees with that the product ε_r P_s can have a maximum with a positive value of x by taking into account the observed behavior that both P_(sat) and T_c monotonously decreased with increasing x.
机译：通过比较Bi_（4-x）Pr_xTi_3O_（12）（BPT，x = 0.3，0.5，0.7，标称）的生长，研究了取向控制生长和热应变诱导的畴演化对铁电极化和机电位移性质的重要性。 Si衬底上的Pt和Ir溅射生长的底部电极层上的电极。在Ir上，BPT膜表现出（111）和（110）优先取向，而在Pt上表现出（117）取向。反映主要自发极化P_s向量与首选轴之间的倾斜角，沉积在Ir层上的BPT膜的剩余极化P_r比Pt上的膜大10-20％。此外，随着x的增加，P_r和居里温度T_c单调降低。这一事实表明用Pr〜（3+）代替Bi〜（3+）会降低微晶的铁电极化性能。作为最终案例，我们在x = 0.3的BPT膜中以90％的极轴取向测量了2P_r = 92μC/ cm〜2的巨大极化。我们通过原子力显微镜测量了BPT膜中场致位移的均匀响应。在x = 0.3处测量到最大位移，并且这一事实在质量上与以下事实一致：考虑到观察到的行为，乘积ε_rP_s可以具有x的最大值，且x随x的增加单调减小。 。

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