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CHARACTERIZATION OF MODE TRANSITIONS FOR RF DISCHARGES IN DIFFERENT GASES

机译:不同气体中射频放电的模式转变的表征

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In this paper inductively coupled plasmas were studied in the low pressure regime, for an electropositive gas, Ar, a weakly electronegative gas O_2, a strongly electronegative gas SF_6 and the mixtures of the last two gases with Ar. DC self bias voltage and optical emission spectroscopy characterized the investigated plasmas. When increasing the power to the inductive source, a strong plasma density increase and a transition of the operation mode occurred. If low power was applied to the inductive source, the plasma was capacitively coupled (E-mode) but, if high power was applied, the plasma became inductively coupled (H-mode). The power level at which this transition took place depended on gas type, pressure and power level at the lower electrode. A certain electron density was necessary for the transition to occur. In the H mode the electron density was higher than in the E mode, but the electron average energy was lower. The mode transition was much more difficult for strongly electronegative gases.
机译:本文在低压条件下研究了电感耦合等离子体,其中包括正电气体Ar,弱电负性气体O_2,强电负性气体SF_6以及后两种气体与Ar的混合物。直流自偏压和光发射光谱表征了所研究的等离子体。当增加感应源的功率时,等离子体密度会大大增加,并且会发生工作模式的转变。如果将低功率施加​​到电感源,则等离子体被电容耦合(E模式),但是,如果施加高功率,则等离子体变为电感性耦合(H模式)。该转变发生的功率水平取决于下部电极上的气体类型,压力和功率水平。为了发生转变,一定的电子密度是必需的。在H模式下,电子密度高于E模式,但电子平均能量较低。对于强电负性气体,模式转变要困难得多。

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