DETERMINATION OF THE ION DENSITY AND ELECTRON TEMPERATURE USING A PLANAR ELECTROSTATIC PROBE

机译：用平面静电探针测定离子密度和电子温度

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A planar electrostatic probe was used to determine the positive ion concentration and the electron temperature in argon and oxygen plasmas. A planar probe is firstly negatively charged, after which ion and electron fluxes return the voltage to the floating potential. From the voltage-time characteristics, it is possible to determine the positive ion flux, the ion density and the electron temperature. The results indicate that the positive ion concentration increases with the power applied to the plasma, while the electron temperature remains approximately constant for argon plasmas and decreases slightly for the oxygen plasmas.

机译：使用平面静电探针确定氩气和氧气等离子体中的正离子浓度和电子温度。首先将平面探针带负电，然后离子和电子通量将电压恢复为浮动电位。根据电压-时间特性，可以确定正离子通量，离子密度和电子温度。结果表明，正离子浓度随施加到等离子体的功率而增加，而对于氩等离子体，电子温度保持大致恒定，而对于氧等离子体，电子温度略有降低。

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《Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509;》|2005年|P.254-262|共9页
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作者
Laura Swart; Patrick Verdonck;
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LSI-PSI-EPUSP Av. Prof. Luciano Gualberto, Trav. 3, 158, Sao Paulo SP, 05508-900, Brazil;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
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1. Determination of the electron temperature in a planar inductive argon plasma with emission spectroscopy and electrostatic probe [J] . Kang NJ, Oh S, Ricard A Journal of Physics, D. Applied Physics: A Europhysics Journal . 2008,第15期

机译：发射光谱和静电探针测定平面感应氩等离子体中的电子温度
2. Electrostatic Probe Determination of Electron Density in Medium Pressure (0.2–28 Torr) Discharge Plasma of Argon [J] . Chen Sinamp Journal of Applied Physics . 1970,第4期

机译：静电探针测定氩气中压（0.2–28托）放电等离子体中的电子密度
3. Comparative determination of the electron temperature in Ar- and N_2-plasmas with electrostatic probes, optical emission spectroscopy OES and energy dispersive mass spectrometry EDMS [J] . G. Crolly, H. Oechsner The European physical journal. Applied physics . 2001,第1期

机译：用静电探针，光发射光谱OES和能量色散质谱EDMS比较确定Ar和N_2等离子体中的电子温度
4. DETERMINATION OF THE ION DENSITY AND ELECTRON TEMPERATURE USING A PLANAR ELECTROSTATIC PROBE [C] . Laura Swart, Patrick Verdonck International Symposium on Microelectronics Technology and Devices . 2005

机译：使用平面静电探针测定离子密度和电子温度
5. Spectroscopic determinations of magnetic fields, electron temperatures, and electron densities in single wire aluminum plasmas. [D] . Blesener, Kate Suzanne. 2012

机译：用光谱法测定单线铝等离子体中的磁场，电子温度和电子密度。
6. Determination of electrostatic potentials at biological interfaces using electron-electron double resonance. [O] . Y K Shin, W L Hubbell 1992

机译：使用电子-电子双共振测定生物界面处的静电势。
7. Shear flow-driven electrostatic instabilities in low density and low temperature pair-ion plasmas with and without electrons [O] . Saleem H, Batool N, Poedts Stefaan 2011

机译：在有和没有电子的低密度和低温对离子等离子体中，剪切流驱动的静电不稳定性
8. Equatorial Scintillation Predictions from C/NOFS Planar Langmuir Probe Electron Density Fluctuation Data. [R] . Costa, E. 2014

机译：C / NOFs平面Langmuir探针电子密度波动数据的赤道闪烁预测。

DETERMINATION OF THE ION DENSITY AND ELECTRON TEMPERATURE USING A PLANAR ELECTROSTATIC PROBE

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