GROWTH OF CARBON NANOSTRUCTURES BY THERMAL CHEMICAL VAPOR DEPOSITION VIA METAL CATALYSIS

机译：金属催化热化学气相沉积法生长碳纳米结构

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

Multiwall carbon nanotubes (MWCNTs), carbon nanofibers (CNFs) and carbon nanosprings (CNCs) were grown by changing the experimental conditions of the thermal chemical vapor deposition process. These experiments were performed using a tubular furnace and methane or acetylene as carbon feedstock gases. Thin films of Ni, Fe or Cu were deposited onto a SiO_2/Si substrate and employed as catalysts. The effect of the growth temperature, metal catalyst and carbon gas precursor on the final carbon nanoestructured material was studied by scanning electron microscopy and Raman spectroscopy.

机译：通过改变热化学气相沉积工艺的实验条件，可以生长多壁碳纳米管（MWCNT），碳纳米纤维（CNF）和碳纳米弹簧（CNC）。这些实验是使用管式炉和甲烷或乙炔作为碳原料气进行的。 Ni，Fe或Cu薄膜沉积在SiO_2 / Si衬底上并用作催化剂。通过扫描电子显微镜和拉曼光谱研究了生长温度，金属催化剂和碳气体前体对最终碳纳米结构材料的影响。

著录项

来源
《Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509;》|2005年|P.311-320|共10页
会议地点
作者
C. Verissimo; S. A. Moshkalyov; A. C. S. Ramos; J. L. Goncalves; J. W. Swart;
展开▼
作者单位

Centra de Componentes Semicondutores - CCS, UNICAMP, C.P. 6061, CEP 13083-870, Campinas, SP, Brasi!;

Instituto de Fisica "Gleb Wataghin" - IFGW, UNICAMP, CEP 13083-970, Campinas, SP, Brasil;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词

相似文献

外文文献
中文文献
专利

1. A molecular dynamics study of the graphitization ability of transition metals for catalysis of carbon nanotube growth via chemical vapor deposition [J] . Shibuta Y, Elliott JA Chemical Physics Letters . 2009,第4a6期

机译：过渡金属的石墨化能力通过化学气相沉积催化碳纳米管生长的分子动力学研究
2. Low Temperature Growth of Carbon Nanostructures by Radio Frequency-Plasma Enhanced Chemical Vapor Deposition (Low Temperature Growth of Carbon Nanostructures by RF-PECVD) [J] . Rao BPC, Maheswaran R, Ramaswamy S, Fullerenes, nanotubes, and carbon nanostructures . 2009,第6期

机译：通过射频等离子体增强化学气相沉积法低温生长碳纳米结构（通过RF-PECVD低温生长碳纳米结构）
3. Thermal chemical vapor deposition (T-CVD) growth of carbon nanotubes on different metallic underlayers [J] . Kim S.M., Gangloff L. Physica, E. Low-dimensional systems & nanostructures . 2011,第8期

机译：碳纳米管在不同金属底层上的热化学气相沉积（T-CVD）生长
4. GROWTH OF CARBON NANOSTRUCTURES BY THERMAL CHEMICAL VAPOR DEPOSITION VIA METAL CATALYSIS [C] . C. Verissimo, S. A. Moshkalyov, A. C. S. Ramos, International Symposium on Microelectronics Technology and Devices . 2005

机译：通过金属催化通过热化学气相沉积碳纳米结构的生长
5. The growth and characterization of III-V compound semiconductor materials by metalorganic chemical vapor deposition and laser photochemical vapor deposition [D] . York, Pamela Kay 1990

机译：金属有机化学气相沉积和激光光化学气相沉积对III-V族化合物半导体材料的生长和表征
6. Metal/Carbon Hybrid Nanostructures Produced from Plasma-Enhanced Chemical Vapor Deposition over Nafion-Supported Electrochemically Deposited Cobalt Nanoparticles [O] . Mohammad Islam, Amine Achour, Khalid Saeed, 2018

机译：在Nafion负载的电化学沉积钴纳米粒子上进行等离子体增强化学气相沉积产生的金属/碳杂化纳米结构
7. Metal/Carbon Hybrid Nanostructures Produced from Plasma-Enhanced Chemical Vapor Deposition over Nafion-Supported Electrochemically Deposited Cobalt Nanoparticles [O] . Mohammad Islam, Amine Achour, Khalid Saeed, 2018

机译：从等离子体增强的化学气相沉积在Nafion-Hasted的电化学沉积的钴纳米粒子中产生的金属/碳杂合纳米结构

GROWTH OF CARBON NANOSTRUCTURES BY THERMAL CHEMICAL VAPOR DEPOSITION VIA METAL CATALYSIS

摘要

著录项

相似文献

相关主题

期刊订阅