STUDY OF ACOUSTIC PROPERTIES OF TiO_2 FILMS WITH THE HELP OF SURFACE ACOUSTIC WAVE RESONATORS

机译：借助表面声波谐振器研究TiO_2薄膜的声学特性

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The one-port SAW resonator coated with TiO_2 film of different thickness is used to study experimentally the effect of SAW attenuation on the border between the crystal and the film. It is shown that SAW attenuation takes place in the film in thin layer of about 500 angstroms thickness. Thickness dependence of frequency shift and Q-factor of SAW oscillator and resonator are presented. Mass sensitivity of SAW resonator to TiO_2 film was measured to be 2.7 kHz/A.

机译：用不同厚度的TiO_2薄膜覆盖的单端口SAW谐振器，通过实验研究了SAW衰减对晶体与薄膜边界的影响。结果表明，SAW衰减在约500埃厚的薄膜中发生。提出了声表面波振荡器和谐振器的频移厚度依赖性和Q因子。 SAW谐振器对TiO_2膜的质量灵敏度经测量为2.7kHz / A。

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《Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509;》|2005年|P.339-348|共10页
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作者
G.P. Alcantara; S.M. Balashov; A. Carola; Che-Uk Kim;
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作者单位

UNICAMP, CCS and FEEC, CEP. 13083-970, CP. 6061, Campinas - SP, Brazil;

SAWDES r. Djalma Campos Padua 31, Campinas-SP, Brazil;

SD WIN-TECH, 9-3 block, Ochang Science Industrial Complex, Cheongwon, Cungbuk, Korea;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
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STUDY OF ACOUSTIC PROPERTIES OF TiO_2 FILMS WITH THE HELP OF SURFACE ACOUSTIC WAVE RESONATORS

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