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Investigations At High Temperature With Molecular Beam Mass Spectrometry Under Equilibrium And Kinetic Conditions

机译:平衡和动力学条件下分子束质谱在高温下的研究

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This article includes equilibrium and kinetic orientated investigation with instruments using molecular beam mass spectrometry. In particular, the Knudsen Effusion Mass Spectrometer (KEMS), Skimmer Coupled Mass . Spectrometer with Thermal Analysis System (STAMS), and High Pressure Mass Spectrometer (HPMS) are described. Four examples on complex systems of ashes including sulfates, chlorides, oxides, carbonates and hydroxides and measurements on aluminum nitride (A1N) as a potential material for application in microelectronics, electronic substrates, chip carriers, and light emitting diodes (LED) will be introduced. Finally, the transmission probability of the molecular beam in KEMS is discussed, based on relevant laboratory observations.
机译:本文包括使用分子束质谱仪进行的平衡和动力学导向的研究。特别是,克努森喷射质谱仪(KEMS),撇渣器耦合质谱仪。描述了带有热分析系统的光谱仪(STAMS)和高压质谱仪(HPMS)。将介绍四个关于灰烬的复杂系统的例子,包括硫酸盐,氯化物,氧化物,碳酸盐和氢氧化物,以及氮化铝(AlN)的测量方法,氮化铝作为微电子,电子基板,芯片载体和发光二极管(LED)的潜在材料。最后,根据相关的实验室观察结果,讨论了分子束在KEMS中的传输概率。

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