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Fast and reliable processing of high-performance InGaAs 0.98-um laser diodes

机译:快速可靠地加工高性能InGaAs 0.98um激光二极管

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Abstract: e and highly reliable processing technique for ridge waveguide InGaAs/GaAs SQW lasers is proposed. The comparison is made with other more conventional processing sequences and the measurements indicate that the characteristics of the lasers obtained by this simple method are at least as good and sometimes even better than those made by using the other processing sequences. It also is shown that the simplicity of the process guarantees a high yield. The high performances of these lasers can be further optimized by applying optical coatings. !17
机译:摘要:提出了脊波导InGaAs / GaAs SQW激光器的一种高度可靠的加工技术。与其他更常规的处理序列进行比较,测量结果表明,通过这种简单方法获得的激光器的特性至少与使用其他处理序列所获得的激光器一样好,有时甚至更好。还表明该方法的简单性保证了高产率。这些激光的高性能可以通过应用光学涂层来进一步优化。 !17

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