FABRICATION AND CHARACTKRIZATION OF Er~(3+)-DOPED TELLURITE GLASS WAVEGUIDES BY Ag~+-Na~+ ION-EXCHANGE METHOD USING A DRY ELECTROMIGRATION PROCESS

机译：利用干电法通过Ag〜+ -Na〜+离子交换法制备掺Er〜（3+）亚铁酸盐玻璃波导及其表征

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Planar waveguides were prepared on 12Na_2O-10NbO_(2.5)·25WO_3·53TeO_2-lEr_2O_3 ([NbWF.r]) substrate glass by Ag+-Na+ ion-cxchangc using a dry electromigration process. The optical properties of the waveguides were characterized and compared with those of [NbWEr] glass waveguides prepared by Ag~+-Na~+ ion-exchange by thermal diffusion. After ion-exchange by both a dry electromigration process and thermal diffusion, the transmittance of the glasses slightly decreased from that of the [NbWEr] substrate glass but frosting was not observed on these ion-exchanged glasses. The depth of the waveguide fabricated at 300℃ by a dry electromigration process was about 8 μm and deeper than that at 380℃ by thermal diffusion. On the [NbWEr] glass ion-exchanged at 300℃ by a dry electromigration process, the stains seen in the [NbWEr] glass ion-exchanged at 380℃ by thermal diffusion were hardly observed. Therefore, the dry electromigration process is promising due to the reduction of the process temperature and fewer stains.

机译：利用干电迁移法，通过Ag + -Na +离子交换法在12Na_2O-10NbO_（2.5）·25WO_3·53TeO_2-1Er_2O_3（[NbWF.r]）基板玻璃上制备了平面波导。对波导的光学性质进行了表征，并与通过热扩散进行Ag〜+ -Na〜+离子交换制备的[NbWEr]玻璃波导进行了比较。通过干式电迁移过程和热扩散进行离子交换后，玻璃的透射率比[NbWEr]基体玻璃的透射率略有下降，但在这些离子交换的玻璃上未观察到结霜。干式电迁移在300℃下制作的波导深度比热扩散在380℃下制作的波导深度深约8μm。在通过干式电迁移过程在300℃离子交换的[NbWEr]玻璃上，几乎观察不到通过热扩散在380℃离子交换的[NbWEr]玻璃上看到的污点。因此，由于工艺温度的降低和污渍的减少，干式电迁移工艺是有前途的。

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《Processing, properties, and applications of glass and optical materials.》|2011年|p.201-207|共7页
会议地点 Cairns(AU);Cairns(AU);Cairns(AU);Cairns(AU)
作者
S. Sakida; K. Kimura; Y. Benino; T. Nanba;
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作者单位

Environmental Management Center, Okayama University, 3-1-1, Tsushima-Naka, Kila-ku, Okayama 700-8530, Japan;

Graduate School of Environmental Science, Okayama University, 3-1-1. Tsushima- Naka, Kita-ku, Okayama 700-8530, Japan;

Graduate School of Environmental Science, Okayama University, 3-1-1. Tsushima- Naka, Kita-ku, Okayama 700-8530, Japan;

Graduate School of Environmental Science, Okayama University, 3-1-1. Tsushima- Naka, Kita-ku, Okayama 700-8530, Japan;

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正文语种 eng
中图分类玻璃工业;玻璃工业;
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3. Diffusion process applied in fabrication of ion-exchanged optical waveguides in novel Er~(3+) and Er~(3+)/Yb~(3+)-doped silicate glasses [J] . B. Svecova, J. Spirkova, S. Janakova, Journal of materials science . 2009,第suppla期

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4. FABRICATION AND CHARACTERIZATION OF Er~(3+)-DOPED TELLURITE GLASS WAVEGUIDES BY Ag~+-Na~+ ION-EXCHANGE METHOD USING A DRY ELECTROMIGRATION PROCESS [C] . S. Sakida, K. Kimura, Y. Benino, International Conference on Advances in the Fusion and Processing of Glass . 2012

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5. Dry silver electromigration process for optical glass waveguide fabrication and fluxless bonding technology for photonics and MEMS packaging. [D] . Chuang, Ricky Wenkuei. 2001

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FABRICATION AND CHARACTKRIZATION OF Er~(3+)-DOPED TELLURITE GLASS WAVEGUIDES BY Ag~+-Na~+ ION-EXCHANGE METHOD USING A DRY ELECTROMIGRATION PROCESS

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